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N,N,N',N',N'',N''-Hexamethylsilantriamin
3DMAS · TDMAS · DK087 · LS 1460 · amino)siL · (Me2N)3SiH · 3DMAS : [(CH3)2N]3SiH · Tris(dimethyamino)silane
Identifikatoren & physikalische Daten
| CAS No. | 15112-89-7 |
|---|---|
| Summenformel | C6H19N3Si |
| Durchschnittliche Molmasse | 161,32 g/mol |
| Monoisotopische Masse | 161,13482414 g/mol |
| SMILES | CN(C)[SiH](N(C)C)N(C)C |
| InChIKey | TWVSWDVJBJKDAA-UHFFFAOYSA-N |
| PubChem CID | 84795 |
| EC No. | 239-165-0 |
| DTXSID | DTXSID00884786 |
| Lokaler Name | N,N,N',N',N'',N''-Hexamethylsilantriamin |
Chemische & physikalische Eigenschaften
| Polarare Oberfläche (TPSA) | 9,7 |
|---|---|
| H-Brücken-Donoren | 0 |
| H-Brücken-Akzeptoren | 3 |
| Frei drehbare Bindungen | 3 |
| Schwere Atome | 10 |
| Formalladung | 0 |
| Komplexität | 74 |
| Schmelzpunkt | <0°C |
| Siedepunkt | 145 °C |
| Dichte | 0,838 g/cm3 |
| Brechungsindex | 1.4247 |
| Flammpunkt | 25°C |
| Lagerbedingungen | 2-8°C, protect from light |
| pKa (Säurekonstante) | 10.93±0.70(Predicted) |
| Aggregatzustand | liquid |
| Farbe | colorless to light yellow |
| Wichte | 0.84 |
| InChI | 1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3 |
| InChIKey | TWVSWDVJBJKDAA-UHFFFAOYSA-N |
| SMILES | CN(C)[SiH](N(C)C)N(C)C |
| EPA chemische Informationen | N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7) |
Sicherheit & Vorschriften
| GHS-Einstufung | This chemical does not meet GHS hazard criteria for 5.8% (4 of 69) of reports.DangerH225 (56.5%): Highly Flammable liquid and vapor [Danger Flammable liquids]P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P261, P262, P264, P270, P271, P280, P284, P301+P317, P301+P330+P331, P302+P335+P334, P302+P352, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P320, P321, P330, P361+P364, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)Aggregated GHS information provided per 69 reports by companies from 7 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies. |
|---|---|
| Regulatorische Informationen | Status: Active Update: 15-09-2022 https://echa.europa.eu/registration-dossier/-/registered-dossier/34209 |
| Hazard Classes and Categories | Flam. Liq. 2 (56.5%) |
| Wassergefährdungsklasse (WGK) | 3 |
| TSCA-Inventar-Status | TSCA listed |
| UN-Transportnummer | 1993 |
| RTECS-Nr. | VV5800000 |
| R-Sätze (R) | 10-36/37/38-52/53-34-29-20-15-11 |
| Toxizität | rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989. |
| Gefahrensymbole | F,C |
| Sicherheitshinweise (S) | 16-26-36/37/39-45-43 |
| Lagerklasse | 4.3 - Hazardous materials which set free flammable gases upon contact with water |
| Gefahrenklasse | Acute Tox. 3 DermalAcute Tox. 3 InhalationAcute Tox. 4 OralEye Dam. 1Flam. Liq. 2Skin Corr. 1BWater-react 2 |
Anwendungen & Verwendung
Verwenden
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.