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BeschreibungTungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3 . At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of 4.56 g/cm3 . In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm.
VerwendenIn the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.
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