Indium oxide → Indium oxide samarium oxide

HRID 1628361

Reaktionsgleichung

Reaktionsgleichung von HRID 1628361
[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[O-2].[Sm+3:7].[O-2].[O-2].[Sm+3]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[O-2:1].[Sm+3:7].[O-2:1].[O-2:1].[Sm+3:7]

Komponenten

3

Edukt 2

HCID 150905Indium oxideHCID 159425Samarium oxide (Sm2O3)

Produkt 1

HCID 131731697Indium oxide samarium oxide

Versuchsvorschrift

Except that a spattering target containing indium oxide and samarium oxide (molar ratio of In:Sm=90:10) was used, indium oxide-samarium oxide (ISmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1. [Evaluation of ISmO thin films of Example 1-9 and Comparative 1-9]

Quellen und Nachweise

ORD-Eintrag
ord-4992c4eca05c4639a7000ff222199b8e
Quelldatensatz
uspto-grants-2014_07
Patentnummer
US08785920B2

Verknüpfte Notizen

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