4419-47-0CC[N-]CC.CC[N-]CC.CC[N-]CC.CC[N-]CC.[Ti+4]VJDVOZLYDLHLSM-UHFFFAOYSA-N4419-47-0
Danger
H225 (100%): Highly Flammable liquid and vapor [Danger Flammable liquids];H314 (100%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]
P210, P233, P240, P241, P242, P243, P260, P264, P280, P301+P330+P331, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P321, P363, P370+P378, P403+P235, P405, and P501 (click each P-code to see the statement)
The GHS information provided by 1 company from 1 notification to the ECHA C&L Inventory.
PMN - indicates a commenced PMN (Pre-Manufacture Notices) substance.
Status: Active Update: 10-11-2008 https://echa.europa.eu/registration-dossier/-/registered-dossier/9564
Tetrakis (diethylamino) titanium: Does not have an individual approval but may be used under an appropriate group standard
PMN - indicates a commenced PMN (Pre-Manufacture Notices) substance.
Status: Active Update: 10-11-2008 https://echa.europa.eu/registration-dossier/-/registered-dossier/9564
Tetrakis (diethylamino) titanium: Does not have an individual approval but may be used under an appropriate group standard
DescriptionTetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
UsesPrecursors Packaged for Depositions Systems
General DescriptionAtomic number of base material: 22 Titanium
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