HuagongsheHuagongshe Chemistry Print Report · For research reference only
Tetrakis(trimethylsiloxy)silane
TETRAKIS(TRIMETHYLSILYLOXY)SILANE · Tetrakis(trimethylsilyl) orthosilicate · Tetrakis(trimethylsilyl) silicate · Trisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]- · DK275 · DK751 · loxy)DKFELEX0194 · Tetrakis(trimethylsietrakis(trimethylsilyl)silicate
Identifiers & Physical Properties
| CAS No. | 3555-47-3 |
|---|---|
| Molecular formula | C12H36O4Si5 |
| Average molar mass | 384.84 g/mol |
| Monoisotopic mass | 384.1459923 g/mol |
| SMILES | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
| InChIKey | VNRWTCZXQWOWIG-UHFFFAOYSA-N |
| PubChem CID | 19086 |
| EC No. | 222-613-4 |
| DTXSID | DTXSID9042463 |
Chemical & Physical Properties
| Topological polar surface area | 36.9 |
|---|---|
| Hydrogen bond donors | 0 |
| Hydrogen bond acceptors | 4 |
| Rotatable bonds | 8 |
| Heavy atoms | 21 |
| Formal charge | 0 |
| Complexity | 266 |
| Chemical classes | Metals -> Metalloid Compounds (Silicon) |
| SpringerMaterials Properties | Boiling point |
| Physical Description | Colorless liquid[Aldrich MSDS] |
| Melting point | -60 °C |
| Boiling point | 103-106 °C/2 mmHg (lit.) |
| Density | 0.87 g/mL at 25 °C (lit.) |
| Vapor pressure | 27.4hPa at 20℃ |
| Refractive index | n20/D 1.389(lit.) |
| Flash point | 169 °F |
| Storage conditions | Inert atmosphere,Room Temperature |
| Physical state | liquid |
| Specific gravity | 0.868 |
| Color | Colorless to Almost colorless |
| Solubility | 150.7ng/L at 23℃ |
| Hydrolytic Sensitivity | 4: no reaction with water under neutral conditions |
| BRN | 1793898 |
| Henry's law constant | 2.6×10-8 mol/(m3Pa) at 25℃, Ebert et al. (2023) |
| InChI | 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3 |
| InChIKey | VNRWTCZXQWOWIG-UHFFFAOYSA-N |
| SMILES | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
| LogP (partition coefficient) | 9 at 25℃ |
| FDA UNII | 55L9T9A11I |
| EPA Substance Registry System | Tetrakis(trimethylsiloxy)silane (3555-47-3) |
| UNSPSC Code | 12352103 |
| NACRES | NA.22 |
| GHS pictogram | GHS07 |
| Signal word | Warning |
| GHS hazard statements | H315-H319-H335 |
| GHS precautionary statements | P261-P264-P271-P280-P302+P352-P305+P351+P338 |
| Target organs | Respiratory system |
| Personal protective equipment (PPE) | Eyeshields, Gloves, type ABEK (EN14387) respirator filter |
| Hazard symbols | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26-36 |
| UN transport number | NA1993 |
| Water hazard class (WGK) | 3 |
| TSCA inventory status | TSCA listed |
| Hazard class | CBLEye Irrit. 2Skin Irrit. 2STOT SE 3 |
| Customs code | 29319090 |
| Storage class | 10 - Combustible liquids |
| REACH registrations | Active |
| Excepted quantities | Non-Hazardous |
Safety & Regulations
| GHS classification | This chemical does not meet GHS hazard criteria for 15.9% (63 of 397) of reports.WarningH315 (51.6%): Causes skin irritation [Warning Skin corrosion/irritation]P261, P264, P264+P265, P271, P273, P280, P302+P352, P304+P340, P305+P351+P338, P319, P321, P332+P317, P337+P317, P362+P364, P403+P233, P405, and P501 (click each P-code to see the statement)Aggregated GHS information provided per 397 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies. |
|---|---|
| Regulatory information | Chemical: Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-Hazard Traits - BioaccumulationEnvironmental PersistenceREACH registered substance: 1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane (EC: 222-613-4)Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis(trimethylsilyl)oxy-: Does not have an individual approval but may be used as a component in a product covered by a group standard. It is not approved for use as a chemical in its own right. |
| Other safety information | IMAP assessments - Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-: Human health tier I assessment |
| Hazards summary | A skin and strong eye irritant[Aldrich MSDS] See Octamethyltrisiloxane. See Dimethoxydimethylsilane. |
| Hazard Classes and Categories | Skin Irrit. 2 (51.6%) |
| Personal protective equipment (PPE) | Eyeshields, Gloves, type ABEK (EN14387) respirator filter |
| Water hazard class (WGK) | 3 |
| TSCA inventory status | TSCA listed |
| UN transport number | NA1993 |
| Customs code | 29319090 |
| Risk statements (R) | 36/37/38 |
| Signal word | Warning |
Applications & Uses
Uses
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.