Silane

Toxic Gases & Vapors -> Hydrides

Flammable agents - 4th degree

Repulsive odor

Characteristic odor

0.68 at -185 °C (liquid)

0.68 @ 185°C

1.11(relative gas density)

Decomposes (NIOSH, 2024)

Slowly decomp in water; practically insol in alc, ether, benzene, chloroform, silicochloroform and silicon tetrachloride; decomp in potassium hydoxide solns.

Solubility in water: slow reaction

Decomposes

-169 °F at 760 mmHg (NIOSH, 2024)

-112 °C

-112 °C

-169 °F

-112 °C @760 [mm Hg]

-169 °F

When heated to decomposition it burns or explodes.

The silanes decomp at elevated temp to liberate hydrogen and deposit a high purity silicon, which leads to some of the principal uses of silanes. /Silanes/

... Decomposes at 752 °F (400 °C) with release of silicon fumes and hydrogen.

-301 °F (NIOSH, 2024)

-185 °C

-185 °C

-301 °F

-185 °C

-301 °F

1.11 (NIOSH, 2024) - Heavier than air; will sink (Relative to Air)

Relative vapor density (air = 1): 1.3

1.11

greater than 1 atm (NIOSH, 2024)

>1 atm

>1 atm

This chemical does not meet GHS hazard criteria for 3.3% (5 of 151) of reports.

Danger

H220 (96.7%): Extremely flammable gas [Danger Flammable gases]

P203, P210, P222, P280, P377, P381, P403, and P410+P403 (click each P-code to see the statement)

Aggregated GHS information provided per 151 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Danger

Chemical: Silane

Silane is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Silane are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

Status: Active Update: 05-09-2022 https://echa.europa.eu/registration-dossier/-/registered-dossier/1963

Silane: HSNO Approval: HSR001012 Approved with controls

The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

· EXTREMELY FLAMMABLE.

Extremely flammable. Gas/air mixtures are explosive.

Silicone hydride will ignite in air by slightly raising the temp or lowering the pressure.

... /Silane/ is mildly endothermic ... Pure material is said not to ignite in air unless the temp be incr or the pressure reduced. Presence of other hydrides as impurities causes ignition always to occur on contact. However, 99.95% pure material, even at concn down to 1% in hydrogen and/or nitrogen, ignites in contact with air unless emerging at very high gas velocity, when mixtures with up to 10% silane content may not ignite. Silane from a cylinder at 24 bar contained inside a ventilated cabinet inadvertently flowed back to the low pressure side of a nitrogen cylinder regulator outside the cabinet. When the regulator failed, the leaking silane ignited and burned outside the cabinet, preventing access to the main silane valve, and the leak reignited after extinguishing the fire. The system has been redesigned to eliminate the problems.

Pyrophoric. Flammable gas. Low ignition energy ...

Extremely flammable ... /Silane/ decomposes on heating or on burning producing silicon and hydrogen, causing fire and explosion hazard ...

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

· Vapors may cause dizziness or asphyxiation without warning, especially when in closed or confined areas.

Silicon tetrahydride may ignite spontaneously in air. Toxicology data is extremely limited. The TLV is based on the subacute effects in rodents at 1000 ppm. Silane has low acute toxicity in inhalation animal experiments. The estimated LC50 is between 5,000 and 10,000 ppm for 4-hour exposures. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC]

2203 116

2203 116

Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.

Moskowitz PD et al; p.97-113 in Hazard Assessment and Control Technology in Semiconductor Manufacture (1989)

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out. In other cases extinguish with powder, carbon dioxide. Combat fire from a sheltered position.

Fresh air, rest. Refer for medical attention.

ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower.

First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area.

Excerpt from NIOSH Pocket Guide for Silicon tetrahydride:

General First Aid:

(General first aid procedures)

... React slowly with water ... A harmful concentration of this gas in the air will be reached very quickly on loss of containment.

Closed containers may rupture violently when heated.

Use fine spray or fog to control fire by preventing its spread and absorbing some of its heat. Stop flow of gas before extinguishing fire. Use water spray to keep fire-exposed containers cool. Do not use halocarbons. Explosive decomposition may occur under fore conditions. Fight fire from protected location or maximum possible distance. Approach fore from upwind to avoid hazardous vapors and toxic decomposition products.

If material on fire or involved in fire: Do not extinguish fire unless flow can be stopped. Do not apply water to point of leak in tank car or container. Use water in flooding quantities as fog. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Use "alcohol" foam, dry chemical or carbon dioxide.

Evacuation: If fire becomes uncontrollable or container is exposed to direct flame - consider evacuation of one-third (1/3) mile radius.

Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out; in other cases extinguish with powder, carbon dioxide.

Fireproof.

Store in a cool, dry, well ventilated location. Separate from alkalies, oxidizing materials, halogens, and air. Outside or detached storage is preferred.

Evacuate danger area! Consult an expert! Ventilation. Remove gas with fine water spray (extra personal protection: self-contained breathing apparatus).

Stop or control the leak, if this can be done without undue risk. Use water spray to cool and disperse vapors and protect personnel. Releases may ignite spontaneously.

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.

The substance can be absorbed into the body by inhalation.

inhalation

Cough. Headache. Nausea. Sore throat.

Redness. ON CONTACT WITH LIQUID: FROSTBITE.

Redness. Pain.

irritation eyes, skin, mucous membrane; nausea, headache

/LABORATORY ANIMALS: Acute Exposure/ In mice, 4 out of 10 animals died following exposure to 9,600 ppm (approx 13,345 mg/cu m) for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

/LABORATORY ANIMALS: Acute Exposure/ Rats exposed at 126 ppm for 1 hr were apparently unaffected.[American Conference of Governmental Industrial Hygienists. Documentation of the TLV's and BEI's with Other World Wide Occupational Exposure Values. CD-ROM Cincinnati, OH 45240-1634 2005., p. 1]

/LABORATORY ANIMALS: Acute Exposure/ ... Male ICR mice (n=10/group) were exposed to approximately 1,000 ppm (approx. 1,390 mg/cu m) of silane for 1 hour or 2, 4, or 8 hours. After sacrifice 3 days postexposure, the organs were examined grossly, and histologically (all exposed and non-exposed mice: nasal cavity, lung, liver, kidney, spleen, thymus, bone marrow, and testis; some of the mice: cornea, trachea, thyroid, salivary glands, and oesophagus). Biochemical and hematological parameters examined included alkaline phosphatase, aspartate and alanine aminotransferase, cholinesterase, blood urea nitrogen, sodium, potassium, red blood cell count, and total and differential white blood cell counts. Neither mortality nor exposure-related changes in any of the organs were observed. Biochemical or hematological parameters affected included an increase in red blood cell counts in mice exposed for 8 hours, an increase in blood urea nitrogen in mice exposed for 1 hour and a decrease in the 8-hour exposure group, and a decreased white blood cell count after 1-hour exposure.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

/LABORATORY ANIMALS: Acute Exposure/ When male ICR mice were exposed to 2,500, 5,000, 7,500, or 10,000 ppm (approx 3,475, 6,950, 10,425, 13,900 mg/cu m) for 30 minutes, 1 hour, or 4 hours, only in the animals exposed to 10,000 ppm for 4 hours, mortality (ie, 9/12; all within 24 hr) was observed. At autopsy of these animals, increased relative kidney weights, renal tubular necrosis, splenic atrophy, appearance of macrophages with debris of degenerated cells in bone marrow and thymus, and inflammatory changes of the nasal mucosa was seen. In the groups exposed for 30 minutes or 1 hour and sacrificed at week 2, mainly effects on the kidneys were found (tubular interstitial nephrosis in 6/8 and 7/8 animals, respectively). Following exposure to 7,500 ppm (only 30-min exposure), tubular nephrosis was seen in 4/8 animals. The 1- and 4-hour exposures to 5,000 ppm caused tubular interstitial nephritis in 1/8 and 2/8 animals sacrificed at week 2, respectively, and acute renal tubular necrosis in 0/4 and 1/4 animals sacrificed after 2 days, respectively. Concerning the 2,500 ppm groups, the only effect observed was acute renal tubular necrosis in 1/4 animals exposed for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

For more Non-Human Toxicity Excerpts (Complete) data for SILANE (6 total), please visit the HSDB record page.

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Anticipate seizures and treat if necessary ... . Monitor for shock and treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... . Cover skin burns with sterile dressings after decontamination ... . /Silane, Chlorosilane, and Related Compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Silane, Chlorosilane, and related compounds/

... ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower ... /For EYES:/ First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.

LC50 Rat inhalation 4000 ppm/4 hr

LD50 Rabbit subcutaneous 3540 mg/kg

LC50 Rat inhalation 9600 ppm/4 hr

Silane

1

10000

Flammable chemical that can be released at a facility.

Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH]

Semiconductor Manufacturing [Category: Industry]

Source of hyperpure silicon for semiconductors.

Doping agent for solid-state devices, production of amorphous silicon.

Silane is used largely as a raw material to form other silicon-containing compounds, but it also serves as a source of silicon for deposition of epitaxial layers.

2023: 5,000,000 - <10,000,000 lb

(1982) > 9.07X10+6 g /est/

Production volumes for non-confidential chemicals reported under the Inventory Update Rule. [Table#5900]

Prepared from aluminum silicide and hydrochloric acid or by electrolysis of an aqueous solution of sodium, ammonium, manganese, or ferrous chloride using an aluminum-silicon alloy as the positive pole; ... from magnesium silicide and HCl; ... from zinc silicide and acid; ... from lithium silicide and acid; ... from magnesium silicide and ammonium bromide or chloride in liquid ammonia; ... from lithium aluminum hydride in ether and silicon tetrachloride; ... from silica gel, aluminum oxide and hydrogen; ... from silicon tetrachloride and sodium aluminum hydride.

Silane is produced by combining an ether solution of silicon tetrachloride with an ether solution of lithium aluminum hydride.

At pressures of > MPa (400 atm), in the presence of aluminum & aluminum halides, silica can be converted to silane in high yields by reaction with hydrogen.

Computer and Electronic Product Manufacturing

Silane: ACTIVE

The parent silane cmpd is reported to have little application in industry; however, many of the derivatives have wide use.