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Silane

HCID 23953
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Basic information

CAS
50808-20-3
Standard SMILES
[SiH4]
InChIKey
BLRPTPMANUNPDV-UHFFFAOYSA-N
Molecular formula
H4Si
Average molar mass
32.117 g/mol
Monoisotopic mass
32.00822666

Overview

Silane is a colorless, flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Silane is lighter than air. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. It is used in the production of amorphous silicon.

Names & identifiers

Preferred name
Silane
IUPAC
silane
English name
Silicon tetrahydride
Molecular formula
H4Si
Molecular weight
32.12

Names & synonyms

SILANESilicaneMonosilaneSilicon tetrahydrideCHEBI:29389RefChem:6217DTXCID3031107232-263-45J076063R17803-62-5DTXSID6052534Flots 100SCO
Show more names
The silaneflots100scotetrahydrureSilicomethane
Silicon hydrideSiH4SilantetrahydridosiliconH4SiSilicon hydride (SiH4)SCHEMBL3294[SiH4]

Database identifiers

CAS
50808-20-3、7803-62-5
PubChem CID
23953
DTXSID
DTXSID6052534
ChEBI
CHEBI:29389
UNII
5J076063R1
EC Number
232-263-4

Properties

Computed structural properties

Topological polar surface area
0 Ų
Hydrogen bond donors
0
Hydrogen bond acceptors
0
Rotatable bonds
0
Heavy atoms
1
Formal charge
0
Complexity
0

Experimental & physicochemical properties

Chemical Classes · 2 items

Toxic Gases & Vapors -> Hydrides

Flammable agents - 4th degree

SpringerMaterials PropertiesGibbs energy
Odor · 2 items

Repulsive odor

Characteristic odor

Density · 3 items

0.68 at -185 °C (liquid)

0.68 @ 185°C

1.11(relative gas density)

Color/FormColorless gas
Solubility · 4 items

Decomposes (NIOSH, 2024)

Slowly decomp in water; practically insol in alc, ether, benzene, chloroform, silicochloroform and silicon tetrachloride; decomp in potassium hydoxide solns.

Solubility in water: slow reaction

Decomposes

Flash PointNA (Gas)
Boiling Point · 6 items

-169 °F at 760 mmHg (NIOSH, 2024)

-112 °C

-112 °C

-169 °F

-112 °C @760 [mm Hg]

-169 °F

Safety & regulation

Safety information is for reference only and does not replace the supplier’s Safety Data Sheet (SDS), applicable regulations, or professional assessment.

GHS classification

GHS Classification · 6 items

This chemical does not meet GHS hazard criteria for 3.3% (5 of 151) of reports.

Danger

H220 (96.7%): Extremely flammable gas [Danger Flammable gases]

P203, P210, P222, P280, P377, P381, P403, and P410+P403 (click each P-code to see the statement)

Aggregated GHS information provided per 151 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Danger

Hazard information

Regulatory Information · 5 items

Chemical: Silane

Silane is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Silane are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

REACH registered substance: Silane (EC: 232-263-4)

Silane: HSNO Approval: HSR001012 Approved with controls

The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)

DOT LabelFlammable Gas
Fire Hazards · 3 items

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

· EXTREMELY FLAMMABLE.

Extremely flammable. Gas/air mixtures are explosive.

Fire Potential · 4 items

Silicone hydride will ignite in air by slightly raising the temp or lowering the pressure.

... /Silane/ is mildly endothermic ... Pure material is said not to ignite in air unless the temp be incr or the pressure reduced. Presence of other hydrides as impurities causes ignition always to occur on contact. However, 99.95% pure material, even at concn down to 1% in hydrogen and/or nitrogen, ignites in contact with air unless emerging at very high gas velocity, when mixtures with up to 10% silane content may not ignite. Silane from a cylinder at 24 bar contained inside a ventilated cabinet inadvertently flowed back to the low pressure side of a nitrogen cylinder regulator outside the cabinet. When the regulator failed, the leaking silane ignited and burned outside the cabinet, preventing access to the main silane valve, and the leak reignited after extinguishing the fire. The system has been redesigned to eliminate the problems.

Chemistry & industry

Pharmacology

Absorption, Distribution and ExcretionThe substance can be absorbed into the body by inhalation.

Uses & manufacturing

Uses · 5 items

Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH]

Semiconductor Manufacturing [Category: Industry]

Source of hyperpure silicon for semiconductors.

Doping agent for solid-state devices, production of amorphous silicon.

Silane is used largely as a raw material to form other silicon-containing compounds, but it also serves as a source of silicon for deposition of epitaxial layers.

ImpuritiesImpurities: Phosphorous trihydride, arsenic trihydride & boron hydride /in gaseous silane/.
U.S. Production · 3 items

2023: 5,000,000 - <10,000,000 lb

(1982) > 9.07X10+6 g /est/

Production volumes for non-confidential chemicals reported under the Inventory Update Rule. [Table#5900]

Consumer UsesSemiconductor and photovoltaic agent
Industry UsesSemiconductor and photovoltaic agent
Methods of Manufacturing · 3 items

Prepared from aluminum silicide and hydrochloric acid or by electrolysis of an aqueous solution of sodium, ammonium, manganese, or ferrous chloride using an aluminum-silicon alloy as the positive pole; ... from magnesium silicide and HCl; ... from zinc silicide and acid; ... from lithium silicide and acid; ... from magnesium silicide and ammonium bromide or chloride in liquid ammonia; ... from lithium aluminum hydride in ether and silicon tetrachloride; ... from silica gel, aluminum oxide and hydrogen; ... from silicon tetrachloride and sodium aluminum hydride.

Silane is produced by combining an ether solution of silicon tetrachloride with an ether solution of lithium aluminum hydride.

Related reactions

101 records
New reaction record
HRID 9702 reaction equation
HRID 9702As reactantuspto-grants-2006_08
HRID 31361 reaction equation
HRID 31361As reactantuspto-grants-2008_09
HRID 36463 reaction equation
HRID 36463As reactantuspto-grants-1995_05
HRID 108257 reaction equation
HRID 108257As reactantTraining data from https://doi.org/10.1039/C8SC04228D (2/10)
HRID 125998 reaction equation
HRID 125998As reactantTraining data from https://doi.org/10.1039/C8SC04228D (2/10)
HRID 141947 reaction equation
HRID 141947As reactantTraining data from https://doi.org/10.1039/C8SC04228D (9/10)
HRID 151497 reaction equation
HRID 151497As reactantTraining data from https://doi.org/10.1039/C8SC04228D (9/10)
HRID 213917 reaction equation
HRID 213917As reactantTraining data from https://doi.org/10.1039/C8SC04228D (6/10)
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Compound notes

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Decomposition · 3 items

When heated to decomposition it burns or explodes.

The silanes decomp at elevated temp to liberate hydrogen and deposit a high purity silicon, which leads to some of the principal uses of silanes. /Silanes/

... Decomposes at 752 °F (400 °C) with release of silicon fumes and hydrogen.

Melting Point · 6 items

-301 °F (NIOSH, 2024)

-185 °C

-185 °C

-301 °F

-185 °C

-301 °F

Vapor Density · 3 items

1.11 (NIOSH, 2024) - Heavier than air; will sink (Relative to Air)

Relative vapor density (air = 1): 1.3

1.11

Vapor Pressure · 3 items

greater than 1 atm (NIOSH, 2024)

>1 atm

>1 atm

Physicochemical properties

Melting point
-185 °C · -185 °C
Boiling point
-112 °C · -112 °C
Density
1.114 g/mL · 1.114 g/mL at 25 °C(lit.)
vapor density
1.1 · 1.1 (vs air)
vapor pressure
100 kPa · 100kPa at 20℃
solubility
2 O; · reacts with H2O; insoluble in ethanol,benzene
form
colorless gas
Specific Gravity
0.68 · 0.680
color
colorless gas; flammable
Odor
repulsive odor
Water Solubility
2 O; · decomposed by H2O; insoluble alcohol, benzene [HAW93]
Specific Heat Capacity
1.33 J/ · Cp(gas): 1.33 J/(g·K), at 25℃
Hydrolytic Sensitivity
10 · 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required
Merck
13 · 13,8562
Exposure limits
5 ppm · ACGIH TLV-TWA:5 ppm (6.57 mg/m3
EWG's Food Scores
1 · 1
FDA UNII
5 J076063R1 · 5J076063R1
EPA Substance Registry System
Silane (7803-62-5)
Symbol(GHS)
2 · GHS02,GHS04
Signal word
Danger
Hazard statements
220 · H220-H280
Precautionary statements
210 · P210-P377-P381-P403
Hazard Codes
F+,Xn
Risk Statements
12 · 12-17-20
Safety Statements
9 · 9-16-33-36/37/39
OEB
B
OEL
5 ppm · TWA: 5 ppm (7 mg/m3)
RIDADR
2203 · UN 2203
WGK Germany
1 · 1
RTECS
1400000 · VV1400000
TSCA
TSCA listed
DOT Classification
2.1 · 2.1 (Flammable gas)
HazardClass
2.1 · 2.1
Hazardous Substances Data
7803 · 7803-62-5(Hazardous Substances Data)
REACH Registrations
Active

Pyrophoric. Flammable gas. Low ignition energy ...

Extremely flammable ... /Silane/ decomposes on heating or on burning producing silicon and hydrogen, causing fire and explosion hazard ...

Health Hazards · 2 items

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

· Vapors may cause dizziness or asphyxiation without warning, especially when in closed or confined areas.

Hazards Summary · 1 item

Silicon tetrahydride may ignite spontaneously in air. Toxicology data is extremely limited. The TLV is based on the subacute effects in rodents at 1000 ppm. Silane has low acute toxicity in inhalation animal experiments. The estimated LC50 is between 5,000 and 10,000 ppm for 4-hour exposures. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC]

DOT ID and Guide · 2 items

2203 116

2203 116

Reactive GroupNitrides, Phosphides, Carbides, and Silicides
UN ClassificationUN Hazard Class: 2.1
Special Reports · 2 items

Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.

Moskowitz PD et al; p.97-113 in Hazard Assessment and Control Technology in Semiconductor Manufacture (1989)

Reactivity AlertsHighly Flammable
OSHA StandardsVacated 1989 OSHA PEL TWA 5 ppm (7 mg/cu m) is still enforced in some states.

Safety & protection

Fire Fighting · 2 items

Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:

Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out. In other cases extinguish with powder, carbon dioxide. Combat fire from a sheltered position.

First Aid Measures · 3 items

Fresh air, rest. Refer for medical attention.

ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower.

First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.

Accidental Release Measures · 2 items

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area.

First Aid · 3 items

Excerpt from NIOSH Pocket Guide for Silicon tetrahydride:

General First Aid:

(General first aid procedures)

Safe StorageFireproof.
Firefighting Hazards · 2 items

... React slowly with water ... A harmful concentration of this gas in the air will be reached very quickly on loss of containment.

Closed containers may rupture violently when heated.

Exposure Control and Personal Protection· Wear positive pressure self-contained breathing apparatus (SCBA).
Fire Fighting Procedures · 4 items

Use fine spray or fog to control fire by preventing its spread and absorbing some of its heat. Stop flow of gas before extinguishing fire. Use water spray to keep fire-exposed containers cool. Do not use halocarbons. Explosive decomposition may occur under fore conditions. Fight fire from protected location or maximum possible distance. Approach fore from upwind to avoid hazardous vapors and toxic decomposition products.

If material on fire or involved in fire: Do not extinguish fire unless flow can be stopped. Do not apply water to point of leak in tank car or container. Use water in flooding quantities as fog. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Use "alcohol" foam, dry chemical or carbon dioxide.

Evacuation: If fire becomes uncontrollable or container is exposed to direct flame - consider evacuation of one-third (1/3) mile radius.

Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out; in other cases extinguish with powder, carbon dioxide.

Storage Conditions · 2 items

Fireproof.

Store in a cool, dry, well ventilated location. Separate from alkalies, oxidizing materials, halogens, and air. Outside or detached storage is preferred.

Cleanup Methods · 2 items

Evacuate danger area! Consult an expert! Ventilation. Remove gas with fine water spray (extra personal protection: self-contained breathing apparatus).

Stop or control the leak, if this can be done without undue risk. Use water spray to cool and disperse vapors and protect personnel. Releases may ignite spontaneously.

Nonfire Spill ResponseExcerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:
Disposal Methods · 1 item

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.

Toxicology

Target OrgansEyes, skin, respiratory system, central nervous system
Adverse EffectsOther Poison - Simple Asphyxiant
Exposure Routes · 2 items

The substance can be absorbed into the body by inhalation.

inhalation

Signs and Symptoms · 4 items

Cough. Headache. Nausea. Sore throat.

Redness. ON CONTACT WITH LIQUID: FROSTBITE.

Redness. Pain.

irritation eyes, skin, mucous membrane; nausea, headache

Human Toxicity Excerpts/SIGNS AND SYMPTOMS/ ACUTE ... SYMPTOMS: Inhalation--Cough. Headache. Nausea. Sore throat ; Skin--Redness. ON CONTACT WITH LIQUID: FROSTBITE; Eyes--Redness. Pain.
Non-Human Toxicity Excerpts · 5 items

/LABORATORY ANIMALS: Acute Exposure/ In mice, 4 out of 10 animals died following exposure to 9,600 ppm (approx 13,345 mg/cu m) for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

/LABORATORY ANIMALS: Acute Exposure/ Rats exposed at 126 ppm for 1 hr were apparently unaffected.[American Conference of Governmental Industrial Hygienists. Documentation of the TLV's and BEI's with Other World Wide Occupational Exposure Values. CD-ROM Cincinnati, OH 45240-1634 2005., p. 1]

/LABORATORY ANIMALS: Acute Exposure/ ... Male ICR mice (n=10/group) were exposed to approximately 1,000 ppm (approx. 1,390 mg/cu m) of silane for 1 hour or 2, 4, or 8 hours. After sacrifice 3 days postexposure, the organs were examined grossly, and histologically (all exposed and non-exposed mice: nasal cavity, lung, liver, kidney, spleen, thymus, bone marrow, and testis; some of the mice: cornea, trachea, thyroid, salivary glands, and oesophagus). Biochemical and hematological parameters examined included alkaline phosphatase, aspartate and alanine aminotransferase, cholinesterase, blood urea nitrogen, sodium, potassium, red blood cell count, and total and differential white blood cell counts. Neither mortality nor exposure-related changes in any of the organs were observed. Biochemical or hematological parameters affected included an increase in red blood cell counts in mice exposed for 8 hours, an increase in blood urea nitrogen in mice exposed for 1 hour and a decrease in the 8-hour exposure group, and a decreased white blood cell count after 1-hour exposure.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

/LABORATORY ANIMALS: Acute Exposure/ When male ICR mice were exposed to 2,500, 5,000, 7,500, or 10,000 ppm (approx 3,475, 6,950, 10,425, 13,900 mg/cu m) for 30 minutes, 1 hour, or 4 hours, only in the animals exposed to 10,000 ppm for 4 hours, mortality (ie, 9/12; all within 24 hr) was observed. At autopsy of these animals, increased relative kidney weights, renal tubular necrosis, splenic atrophy, appearance of macrophages with debris of degenerated cells in bone marrow and thymus, and inflammatory changes of the nasal mucosa was seen. In the groups exposed for 30 minutes or 1 hour and sacrificed at week 2, mainly effects on the kidneys were found (tubular interstitial nephrosis in 6/8 and 7/8 animals, respectively). Following exposure to 7,500 ppm (only 30-min exposure), tubular nephrosis was seen in 4/8 animals. The 1- and 4-hour exposures to 5,000 ppm caused tubular interstitial nephritis in 1/8 and 2/8 animals sacrificed at week 2, respectively, and acute renal tubular necrosis in 0/4 and 1/4 animals sacrificed after 2 days, respectively. Concerning the 2,500 ppm groups, the only effect observed was acute renal tubular necrosis in 1/4 animals exposed for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]

For more Non-Human Toxicity Excerpts (Complete) data for SILANE (6 total), please visit the HSDB record page.

Antidote and Emergency Treatment · 3 items

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Anticipate seizures and treat if necessary ... . Monitor for shock and treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... . Cover skin burns with sterile dressings after decontamination ... . /Silane, Chlorosilane, and Related Compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Silane, Chlorosilane, and related compounds/

... ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower ... /For EYES:/ First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.

Toxicity DataLC50 (rat) = 9,600 ppm/4h
Non-Human Toxicity Values · 3 items

LC50 Rat inhalation 4000 ppm/4 hr

LD50 Rabbit subcutaneous 3540 mg/kg

LC50 Rat inhalation 9600 ppm/4 hr

Regulatory information

DHS Chemicals of Interest (COI) · 4 items

Silane

1

10000

Flammable chemical that can be released at a facility.

Safety data

OEB
B
OEL
TWA: 5 ppm (7 mg/m3)
wgk
1
tsca
TSCA listed
rtecs
VV1400000
ridadr
UN 2203
risk_code
12-17-20
Signal word
Danger
Symbol(GHS)
GHS02,GHS04
hazard_code
F+,Xn
safety_code
9-16-33-36/37/39
hazard_class
2.1
Hazard statements
H220-H280
DOT Classification
2.1 (Flammable gas)
REACH Registrations
Active
Precautionary statements
P210-P377-P381-P403
Hazardous Substances Data
7803-62-5(Hazardous Substances Data)

At pressures of > MPa (400 atm), in the presence of aluminum & aluminum halides, silica can be converted to silane in high yields by reaction with hydrogen.

Formulations/PreparationsThe composition of the silane mixture is 40 wt% silicone tetrahydride, 30 wt% silicon hydride, 15 wt% trisilane, & 15 wt% higher silanes.
General Manufacturing Information · 3 items

Computer and Electronic Product Manufacturing

Silane: ACTIVE

The parent silane cmpd is reported to have little application in industry; however, many of the derivatives have wide use.

Applications · 5 items

DescriptionSilane is a colorless, spontaneously flammable (pyrophoric) gas. It has a choking odor and may form explosive mixtures with air. Silane will react violently with heavy metal halides and free halogens other than hydrogen chloride.

UsesSilane, SiH4 is a colorless gas that is spontaneously flammable in air and slowly decomposed by water; in the presence of aqueous alkali it is completely hydrolyzed to form hydrogen and silicates. It is manufactured on a commercial scale and sold as a compressed gas in cylinders. Silane, pure or doped, is used to prepare semiconducting silicon by thermal decomposition at >600 °C. Gaseous dopants such as germane, arsine, or diborane may be added to the silane at very low concentrations in the epitaxial growing of semiconducting silicon for the electronics industry. Higher silanes, eg, Si2H6 and Si3H8, are known but are less stable than SiH4. These are analogues of lower saturated hydrocarbons.

UsesIt is used for doping of solid-state devicesand for preparing semiconducting silicon forthe electronic industry.

UsesSource of hyperpure silicon for semiconductors.

General DescriptionSilicon tetrahydride is a colorless, flammable and poisonous gas, with a strong repulsive odor. Silicon tetrahydride is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Silicon tetrahydride is lighter than air. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Silicon tetrahydride is used in the production of amorphous silicon.

Upstream & downstream products

Upstream raw materials

SiliconAmmonium chlorideMagnesium

Downstream products

bacterical adhesiveLamivudineENPROSTILsilica gel for photo catalysisTeicoplanin A2EAM resin adhesive modified with diisocyanate for orthodontiasFlusilazoleCEFTRIAXONEmedicinal adhesive SDG

Additional notes

DefinitionChEBI: The simplest silane, consisting of a single silicon atom carrying four hydrogens.