169896-41-7CC(C)(C)[N]=[Ta].CC[N-]CC.CC[N-]CC.CC[N-]CCOAUVVCYTHMBYBP-UHFFFAOYSA-NSee also: t-Butylimino tris (diethylamino) tantalum (annotation moved to) ... View More ...
169896-41-7DTXSID60937707Safety information is for reference only and does not replace the supplier’s Safety Data Sheet (SDS), applicable regulations, or professional assessment.
UsesTantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.
UsesTantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.
General DescriptionAtomic number of base material: 73 Tantalum
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