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Tungsten hexafluoride

HCID 522684
NotesReactions
Basic informationOverviewNames & identifiersPropertiesSafety & regulationChemistry & industryRelated reactionsCompound notes
Substructure searchFind similar structures

Basic information

CAS
7783-82-6
Standard SMILES
[F][W]([F])([F])([F])([F])[F]
InChIKey
NXHILIPIEUBEPD-UHFFFAOYSA-H
Molecular formula
F6W
Average molar mass
297.83 g/mol
Monoisotopic mass
297.941352

Overview

Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

Names & identifiers

Preferred name
Tungsten hexafluoride
IUPAC
hexafluorotungsten
English name
Tungsten hexafluoride
Molecular formula
F6W
Molecular weight
297.83

Names & synonyms

Tungsten hexafluorideHexafluorotungsten7783-82-6Tungsten fluoride (WF6), (OC-6-11)-Tungsten fluorideUNII-45B0AG2C4SHSDB 8038Tungsten fluoride (WF6)EINECS 232-029-1UN219645B0AG2C4SEC 232-029-1
Show more names
WF6WFsmixed gasTungstenfluorideTUNGSTEN(VI) FLUORIDETungstenhexafluoride99%Wolfram(VI)hexafluorideTungsten hexafluoride 99%
DTXSID80893770UN 2196RefChem:192527DTXCID001323805TUNGSTEN HEXAFLUORIDE (WF6)232-029-1NXHILIPIEUBEPD-UHFFFAOYSA-HTUNGSTEN HEXAFLUORIDE [MI]

Database identifiers

CAS
7783-82-6
PubChem CID
522684
DTXSID
DTXSID80893770
EC Number
232-029-1

Properties

Computed structural properties

Topological polar surface area
0 Ų
Hydrogen bond donors
0
Hydrogen bond acceptors
6
Rotatable bonds
0
Heavy atoms
7
Formal charge
0
Complexity
62.7

Experimental & physicochemical properties

Chemical Classes · 2 items

Toxic Gases & Vapors -> Corrosive Gases

Corrosives

SpringerMaterials Propertiesphonon wavenumber
Density · 2 items

3.44 g/cu cm

13.069 @25 °C

Color/Form · 2 items

Yellow liquid or colorless gas

Orthorhombic, deliquescent crystals when solid

Solubility · 5 items

Reacts with water

Decomposes in water

Very soluble in carbon tetrachloride, cyclohexane

Solubility in anhydrous hexafluoride: 3.14 moles/1000 g HF

MIscible with many colvents (e.g. cyclohexane, carbon tetrachloride)

CorrosivityCorrosive liquid
Boiling Point · 3 items

67 °F

17.1 °C

17.5 °C @760 [mm Hg]

Melting Point · 3 items

37 °F

1.9 °C

2.3 °C

Heat of Vaporization26.5 kJ/mol at 17.1 °C
Physical Description · 3 items

Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

CBI; Gas Vapor; Liquid

Colorless gas or light-yellow liquid that decomposes in water; [Hawley]

Other Experimental Properties · 3 items

Critical volume: 233 cu cm/mol

Specific gavity: 3.551 at 15 °C/liquid

Hexane solutions often strongly colored

Physicochemical properties

Melting point
2.3 °C · 2.3 °C(lit.)
Boiling point
17.5 °C · 17.5 °C(lit.)
Density
15 liq · d15liq 3.441
vapor pressure
10 hPa · 10hPa at 20℃
solubility
2 O; · reacts with H2O; very soluble in ctc,cyclohexane
form
colorless gas
color
yellow
Water Solubility
decomposes
Specific Heat Capacity
0.4 J/ · Cp(gas): 0.4 J/(g·K), at 25℃
Merck
13 · 13,9885
InChI
InChI=1S/6FH.W/h6*1H;/q;;;;;;+6/p-6
InChIKey
NXHILIPIEUBEPD-UHFFFAOYSA-H
SMILES
[W](F)(F)(F)(F)(F)F
CAS DataBase Reference
7783 · 7783-82-6(CAS DataBase Reference)
FDA UNII
45 B0AG2C4S · 45B0AG2C4S
NIST Chemistry Reference
Tungsten hexafluoride(7783-82-6)
EPA Substance Registry System
Tungsten fluoride (WF6), (OC-6-11)- (7783-82-6)
UNSPSC Code
12352302 · 12352302
NACRES
23 · NA.23
Symbol(GHS)
4 · GHS04,GHS05,GHS06
Signal word
Danger
Hazard statements
314 · H314-H318-H330
Precautionary statements
260 · P260-P264-P280-P271-P284-P301+P330+P331-P303+P361+P353-P363-P304+P340-P310-P305+P351+P338-P405-P403+P233-P501
PPE
Faceshields, Gloves, Goggles

Safety & regulation

Safety information is for reference only and does not replace the supplier’s Safety Data Sheet (SDS), applicable regulations, or professional assessment.

GHS classification

GHS Classification · 6 items

Danger

H280 (100%): Contains gas under pressure; may explode if heated [Warning Gases under pressure]

P260, P262, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 142 reports by companies from 10 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Danger

H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]

Hazard information

Hazards IdentificationToxic/poison by inhalation (TIH/PIH)
Regulatory Information · 3 items

Tungsten fluoride (WF6), (OC-6-11)- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Tungsten fluoride (WF6), (OC-6-11)- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

REACH registered substance: Tungsten hexafluoride (EC: 232-029-1)

The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)

DOT LabelPoison Gas Corrosive
Fire Hazards · 2 items

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

· Some may burn but none ignite readily.

Health Hazards · 2 items

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

· TOXIC and/or CORROSIVE; may be fatal if inhaled, ingested or absorbed through skin.

Hazards SummaryHydrolyzes to HF after contact with water or moisture; Corrosive to skin, eyes, and respiratory tract; Inhalation can cause acute pulmonary edema; [CHEMINFO MSDS]
DOT ID and Guide2196 125
Reactive GroupFluoride Salts, Soluble
TSCA Requirements · 1 item

Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.

Reactivity AlertsWater-Reactive
Reactivity ProfileTUNGSTEN HEXAFLUORIDE emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143].
DOT Hazard Classification · 4 items

Tungsten hexafluoride

UN2196

Div 2.3 Poisonous gas (49 eCFR § 173.115)

Div 2.3 Poisonous gas (49 eCFR § 173.115)

Safety & protection

Fire FightingExcerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
Accidental Release Measures · 2 items

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· Do not touch or walk through spilled material.

First Aid · 2 items

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

General First Aid:

Exposure Control and Personal Protection · 3 items

· Wear positive pressure self-contained breathing apparatus (SCBA).

Biological Exposure Indices (BEI) [ACGIH] - Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)

1.0 [mg/m3], as F, inhalable fraction[German Research Foundation (DFG)]

Fire Fighting Procedures · 1 item

If material involved in fire: Use dry chemical, dry sand, or carbon dioxide. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.

Storage ConditionsMay be stored in glass pressure ampuls.
Cleanup Methods · 4 items

Environmental considerations: Land spill: Dike surface flow using soil, sand bags, foamed polyurethane, or foamed concrete. Absorb bulk liquid with fly ash, cement powder, or commercial sorbents.

Environmental considerations: Water spill: Use natural deep water pockets excavated lagoons, or sand bag barriers to trap material at bottom. Remove trapped material with suction hoses.

Environmental considerations: Air spill: Vapor knockdown water is corrosive or toxic and should be diked for containment.

If material not involved in fire: Neutralize spilled material with crushed limestone, soda ash, or lime.

Toxicology

Adverse EffectsDermatotoxin - Skin burns.
Probable Routes of Human Exposure · 1 item

According to the 2006 TSCA Inventory Update Reporting data, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use of tungsten hexafluoride is 1 to 99; the data may be greatly underestimated(1).

Antidote and Emergency Treatment · 5 items

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Fluorine and related compounds/

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Monitor for shock and treat if necessary ... . Anticipate seizures adn treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patent can swallow, has a strong gag reflex, and does not drool. ... . Cover skin burns with dry sterile dressings after decontamination ... . /Fluorine and related compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Positive-pressure ventilation techniques with a bag valve mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Fluorine and related compounds/

Regulatory information

TSCA Requirements · 1 item

Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.

DHS Chemicals of Interest (COI) · 4 items

Tungsten hexafluoride

7.1

45

Weapons of Mass Effect chemical material that, if stolen or diverted, can be converted into weapons using simple chemistry, equipment, or techniques.

Safety data

PPE
Faceshields, Gloves, Goggles
wgk
3
tsca
TSCA listed
rtecs
YO7720000
ridadr
UN 2196
hs_code
2826199090
risk_code
23/24/25-34
Signal word
Danger
Symbol(GHS)
GHS04,GHS05,GHS06
hazard_code
T,C
hazard_note
Toxic/Corrosive
safety_code
26-36/37/39-45
hazard_class
2.3
Storage Class
2A - Gases
Hazard statements
H314-H318-H330
REACH Registrations
Active
Hazard Classifications
Acute Tox. 2 InhalationPress. Gas Compr. GasSkin Corr. 1A
Precautionary statements
P260-P264-P280-P271-P284-P301+P330+P331-P303+P361+P353-P363-P304+P340-P310-P305+P351+P338-P405-P403+P233-P501
Hazardous Substances Data
7783-82-6(Hazardous Substances Data)

Chemistry & industry

Uses & manufacturing

Uses · 4 items

Used in the application of tungsten coatings; Used in chemical synthesis; [NJ-HSFS]

Its major use is in chemical vapor deposition (CVD), which produces tungsten coatings on both conducting and insulating substrates.

In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.

Fluorinating agent

U.S. Production · 2 items

2023: 1,000,000 - <5,000,000 lb

Production volume for non-confidential chemicals reported under the 2006 Inventory Update Rule. Chemical: Tungsten fluoride. Aggregated National Production Volume: 500,000 to < 1 million lbs.

Consumer UsesOther
Industry UsesEtching agent
Methods of Manufacturing · 2 items

Manufactured by the direct action of elemental fluorine on solid powdered tungsten, e.g., in a flame reactor.

Prepared by direct fluorination of powdered tungsten. Can be purified by distillation, preferably under pressure.

General Manufacturing Information · 2 items

Computer and Electronic Product Manufacturing

Tungsten fluoride (WF6), (OC-6-11)-: ACTIVE

Applications · 3 items

DescriptionTungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3 . At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of 4.56 g/cm3 . In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm.

UsesIn the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.

General DescriptionA toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

Upstream & downstream products

Upstream raw materials

Tungsten

Downstream products

Tungsten carbideTungsten carbide

Suppliers38 total

山东瑞博恩新材料科技有限公司15064961989 · [email protected]
安徽旺山旺水特种气体有限公司15906197626 · [email protected]
江西核研院新材料有限公司18901398682 18901398682 · [email protected]
湖南省华中特种气体有限公司0734-8755555 15674722888 · [email protected]
上海迈瑞尔生化科技有限公司4006356688 18621169109 · [email protected]
武汉易泰科技有限公司上海分公司18930552037 · [email protected]
尚澜气体(上海)有限公司4001882517 13194677939 · [email protected]
山东洛克化工有限公司17653113209 13065062079 · [email protected]
常州市华阳科技有限公司+8615250961469 · [email protected]
上海嘉斯保气体有限公司13218776790 13218776790 · [email protected]
济南市万理气体有限公司13245484555 · [email protected]
时美拓特种气体(上海)有限公司18557025385 15757158480 · [email protected]
Shanghai Scibiotron Pharmaceutical Co., Ltd+86-16621589600 · [email protected]
山东智尚新材料有限公司+8617653113209 · [email protected]
上海辰楚化学有限公司13651748127 · [email protected]

Related reactions

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Compound notes

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On this pageBasic informationOverviewNames & identifiersPropertiesSafety & regulationChemistry & industryRelated reactionsCompound notes
Hazard Codes
T,C
Risk Statements
23 · 23/24/25-34
Safety Statements
26 · 26-36/37/39-45
RIDADR
2196 · UN 2196
WGK Germany
3 · 3
RTECS
7720000 · YO7720000
Hazard Note
Toxic/Corrosive
TSCA
TSCA listed
HazardClass
2.3 · 2.3
HS Code
2826199090 · 2826199090
Storage Class
2 A · 2A - Gases
Hazard Classifications
2 InhalationPress · Acute Tox. 2 InhalationPress. Gas Compr. GasSkin Corr. 1A
Hazardous Substances Data
7783 · 7783-82-6(Hazardous Substances Data)
REACH Registrations
Active
Nonfire Spill Response
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
Disposal Methods · 1 item

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.

Preventive Measures · 2 items

If material not involved in fire: Keep material out of water sources and sewers. Build dikes to contain low as necessary. Use water spray to knock-down vapors. Do not use water on material itself.

Personnel protection: Avoid breathing vapors. Keep upwind. Avoid bodily contact with the material. Do not handle broken packages unless wearing appropriate personal protective equipment. Wash away any material which may have contacted the body with copious amounts of water or soap and water. If contact with the material anticipated, wear appropriate chemical protective clothing.

Isolation and Evacuation · 4 items

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Immediate precautionary measure

Small spill:

Small spill:

Threshold Limit Values (TLV) · 2 items

3.0 [mg/m3], as W, respirable particulate matter (2.5 mg/m3, as F)

8 hr Time Weighted Avg (TWA): 1 mg/cu m; 15 min Short Term Exposure Limit (STEL): 3 mg/cu m. /Tungsten soluble compounds/

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Choking Agents (Pulmonary/Lung-Damaging Agents)/

For more Antidote and Emergency Treatment (Complete) data for Tungsten hexafluoride (6 total), please visit the HSDB record page.

Toxicity DataLC50 (rat) = 1,430 mg/m3
茂图气体设备(上海)有限公司17301833415 · [email protected]
上海众巍化学有限公司18824865657 · [email protected]
Shaanxi Didu New Materials Co. Ltd+86-86-17392712779 +86-13289823923 · [email protected]
拓元(潍坊)新材料科技有限公司13940155665 · [email protected]
河南天孚化工有限公司+86-0371-55170693 +86-19937530512 · [email protected]
厦门盈融达化工有限公司+86-0592-6210733 · [email protected]
career henan chemical co+86-0371-86658258 · [email protected]
SHANDONG ZHI SHANG CHEMICAL CO.LTD0531-68652808 18953170293 · [email protected]
湖南秉航新材料有限公司85521272 18932438858 · [email protected]
爆牛贸易重庆有限公司+86-023-6139-8061 +86-86-13650506873 · [email protected]
陕西缔都医药化工有限公司029-029-029-81148696 18161915376 · [email protected]
湖北玖天生物医药科技有限公司027-88013699 17354350817 · [email protected]
XIAMEN AMITY INDUSTRY AND TRADE CO., LTD.+8618950047208 · [email protected]
广州市粤佳气体有限公司400-6377517 19876107228 · [email protected]
广东元丰化学试剂有限公司0751-2829979 13318584237 · [email protected]
SUZHOU SENFEIDA CHEMICAL CO.,LTD+86-0512-83500002 +86-15195660023 · [email protected]
DAYANG CHEM (HANGZHOU) CO.,LTD+86-88938639 +86-17705817739 · [email protected]
上海珅桔化工有限公司13167128868 13661427209 · [email protected]
Hebei Chuanghai Biotechnology Co., Ltd+86-15350571055 · [email protected]
中船(邯郸)派瑞特种气体股份有限公司0310-7182720-613 15620672519 · [email protected]
原研化学(山东)有限公司17806130302 · [email protected]
Hefei TNJ Chemical Industry Co.,Ltd.+86-0551-65418671 +86-189 4982 3763 · [email protected]
CD Chemical Group Limited+86-13651442114 · [email protected]