Basic information
- Standard SMILES
CN(C)[Si](C)(C)N(C)C- InChIKey
QULMGWCCKILBTO-UHFFFAOYSA-N- Molecular formula
- C6H18N2Si
- Average molar mass
- 146.31 g/mol
- Monoisotopic mass
- 146.12392511
Names & identifiers
- Preferred name
- Bis(dimethylamino)dimethylsilane
- IUPAC
- N-[dimethylamino(dimethyl)silyl]-N-methylmethanamine
- English name
- Bis(dimethylamino)dimethylsilane
- Molecular formula
- C6H18N2Si
- Molecular weight
- 146.31
Names & synonyms
Show more names
Database identifiers
- CAS
3768-58-9- PubChem CID
- 77384
- DTXSID
DTXSID8063177- EC Number
- 223-200-1
- Nikkaji
- J21.115J
Properties
Computed structural properties
- Topological polar surface area
- 6.5 Ų
- Hydrogen bond donors
- 0
- Hydrogen bond acceptors
- 2
- Rotatable bonds
- 2
- Heavy atoms
- 9
- Formal charge
- 0
- Complexity
- 79.1
Experimental & physicochemical properties
Physicochemical properties
- Melting point
- 98 °C · −98 °C(lit.)
- Boiling point
- 128 · 128-129 °C(lit.)
- Density
- 0.809 g/mL · 0.809 g/mL at 25 °C(lit.)
- vapor density
- 1 · >1 (vs air)
- vapor pressure
- 1 mm · 1 mm Hg ( 20 °C)
- refractive index
- 20 · n20/D 1.417(lit.)
- Flash point
- 18 °F · 18 °F
- storage temp.
- Flammables area
- form
- liquid
- pka
- 10.76 · 10.76±0.70(Predicted)
- Specific Gravity
- 0.81 · 0.81
- color
- colorless
- Water Solubility
- Hydrolyzes in water.
- Sensitive
- Moisture Sensitive
- Hydrolytic Sensitivity
- 8 · 8: reacts rapidly with moisture, water, protic solvents
- BRN
- 1736095 · 1736095
- CAS DataBase Reference
- 3768 · 3768-58-9(CAS DataBase Reference)
- EPA Substance Registry System
- Silanediamine, hexamethyl- (3768-58-9)
- Symbol(GHS)
- 2 · GHS02,GHS05
- Signal word
- Danger
- Hazard statements
- 225 · H225-H314
- Precautionary statements
- 210 · P210-P233-P240-P280-P303+P361+P353-P305+P351+P338
- Hazard Codes
- F,C
- Risk Statements
- 11 · 11-15-34
- Safety Statements
- 16 · 16-26-36/37/39-45-27
- RIDADR
- 2924 · UN 2924 3/PG 2
- WGK Germany
- 3 · 3
- F
- 10 · 10-21
- TSCA
- TSCA listed
- HazardClass
- 3 · 3
- PackingGroup
- II
- HS Code
- 29319090 · 29319090
- Limited Quantities
- 1 L · 1.0 L (0.3 gallon) (liquid)
- Excepted Quantities
- Max Inner Pack (30g or 30ml) and Max Outer Pack (500g or 500ml)
Safety & regulation
GHS classification
GHS Classification
Danger
H225 (100%): Highly Flammable liquid and vapor [Danger Flammable liquids]
P210, P233, P240, P241, P242, P243, P260, P264, P280, P301+P330+P331, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P321, P363, P370+P378, P403+P235, P405, and P501 (click each P-code to see the statement)
Aggregated GHS information provided per 47 reports by companies from 5 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.
Hazard information
Toxicology
Safety data
- F
- 10-21
- wgk
- 3
- tsca
- TSCA listed
- ridadr
- UN 2924 3/PG 2
- hs_code
- 29319090
- risk_code
- 11-15-34
- Signal word
- Danger
- Symbol(GHS)
- GHS02,GHS05
- hazard_code
- F,C
- safety_code
- 16-26-36/37/39-45-27
- hazard_class
- 3
- packing_group
- II
- Hazard statements
- H225-H314
- Limited Quantities
- 1.0 L (0.3 gallon) (liquid)
- Excepted Quantities
- Max Inner Pack (30g or 30ml) and Max Outer Pack (500g or 500ml)
- Precautionary statements
- P210-P233-P240-P280-P303+P361+P353-P305+P351+P338
Chemistry & industry
Uses & manufacturing
Uses
Used in electronic film deposition; [Matheson Tri-Gas MSDS]
Semiconductor Manufacturing [Category: Industry]
Applications
UsesBis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.
UsesBis(dimethylamino)-dimethyl silane has been used to silanize pH-sensitive microelectrodes, used to measure the membrane potential in oocytes, in an experimental procedure aimed towards cloning and characterizing human electrogenic Na+-cotransporter isoform (hhNBC). It is also used for microelectrode measurements, in a study conducted to measure carbon dioxide transport through membranes. It is also used in electronic film deposition.
Upstream & downstream products
Downstream products
Suppliers50 total
Related reactions
Linked notes
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