Bis(dimethylamino)dimethylsilane

HCID 77384CAS 3768-58-9

Basic information

Standard SMILES
CN(C)[Si](C)(C)N(C)C
InChIKey
QULMGWCCKILBTO-UHFFFAOYSA-N
Molecular formula
C6H18N2Si
Average molar mass
146.31 g/mol
Monoisotopic mass
146.12392511

Names & identifiers

Preferred name
Bis(dimethylamino)dimethylsilane
IUPAC
N-[dimethylamino(dimethyl)silyl]-N-methylmethanamine
English name
Bis(dimethylamino)dimethylsilane
Molecular formula
C6H18N2Si
Molecular weight
146.31

Names & synonyms

Bis(dimethylamino)dimethylsilane3768-58-9Silanediamine, hexamethyl-N,N,N',N',1,1-hexamethylsilanediamineEINECS 223-200-1DTXSID8063177Silanediamine, N,N,N',N',1,1-hexamethyl-Silanediamine, hexamethylRefChem:569064DTXCID2039382Silanediamine, N,N,N',N',1,1hexamethyl223-200-1
Show more names
DK282BDMADMSamino)dimethyLhexamethyl-silanediaminhexamethyl-SilanediamineSilanediamine,hexamethyl-BDMADMS: [N(CH3)2]2(CH3)2SiBIS(DIMETHYLAMINO)DIMETHYSILANE
MFCD00008296N-[dimethylamino(dimethyl)silyl]-N-methylmethanamineS01600C6H18N2Si[(dimethylamino)dimethylsilyl]dimethylamineSCHEMBL49557Dimethylbis[dimethylamino]silanebis(dimethylamino) dimethylsilane

Database identifiers

CAS
3768-58-9
PubChem CID
77384
DTXSID
DTXSID8063177
EC Number
223-200-1
Nikkaji
J21.115J

Properties

Computed structural properties

Topological polar surface area
6.5 Ų
Hydrogen bond donors
0
Hydrogen bond acceptors
2
Rotatable bonds
2
Heavy atoms
9

Experimental & physicochemical properties

Chemical ClassesMetals -> Metalloid Compounds (Silicon)
SpringerMaterials Properties29Si nuclear magnetic resonance spectrum
Vapor Pressure1.0 [mmHg]
Physical DescriptionClear to straw-colored liquid with an acrid amine odor; [Matheson Tri-Gas MSDS]

Physicochemical properties

Melting point
98 °C · −98 °C(lit.)
Boiling point
128 · 128-129 °C(lit.)
Density
0.809 g/mL · 0.809 g/mL at 25 °C(lit.)
vapor density
1 · >1 (vs air)
vapor pressure
1 mm · 1 mm Hg ( 20 °C)
refractive index
20 · n20/D 1.417(lit.)

Safety & regulation

GHS classification

GHS Classification · 4 items

Danger

H225 (100%): Highly Flammable liquid and vapor [Danger Flammable liquids]

P210, P233, P240, P241, P242, P243, P260, P264, P280, P301+P330+P331, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P321, P363, P370+P378, P403+P235, P405, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 47 reports by companies from 5 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Hazard information

Hazards SummaryReacts with water/moisture producing dimethylamine; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract; [Matheson Tri-Gas MSDS] See Bis(dimethylamino)diphenylsilane and Bis(dimethylamino)methylvinylsilane.
Hazard Classes and CategoriesFlam. Liq. 2 (100%)

Toxicology

Adverse EffectsDermatotoxin - Skin burns.

Safety data

F
10-21
wgk
3
tsca
TSCA listed
ridadr
UN 2924 3/PG 2
hs_code
29319090
risk_code
11-15-34

Chemistry & industry

Uses & manufacturing

Uses · 2 items

Used in electronic film deposition; [Matheson Tri-Gas MSDS]

Semiconductor Manufacturing [Category: Industry]

General Manufacturing InformationSilanediamine, N,N,N',N',1,1-hexamethyl-: ACTIVE
Applications · 2 items

UsesBis(dimethylamino)dimethylsilane is used in the chemical vapor deposition of silicon nitride films, and also the atomic layer deposition of SiNxCy dielectric sealing layers using plasma-enhanced atomic layer deposition (PE-ALD). It is also used as a reagent for silylation.

UsesBis(dimethylamino)-dimethyl silane has been used to silanize pH-sensitive microelectrodes, used to measure the membrane potential in oocytes, in an experimental procedure aimed towards cloning and characterizing human electrogenic Na+-cotransporter isoform (hhNBC). It is also used for microelectrode measurements, in a study conducted to measure carbon dioxide transport through membranes. It is also used in electronic film deposition.

Upstream & downstream products

Suppliers50 total

梯希爱(上海)化成工业发展有限公司021-67121386 · [email protected]
上海源象化学有限公司17312431727 · [email protected]
上海阿拉丁生化科技股份有限公司400-6206333 13167063860 · [email protected]
上海麦克林生化科技股份有限公司021-50706066 15221275939 · [email protected]
温州共赢化学有限公司+86-0086-577-64498589 +86-15355981851 · [email protected]

Related reactions

3 records

Linked notes

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Bis(dimethylamino)dimethylsilane (HCID 77384)|Huagongshe