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Tantalum nitride (TaN)

HCID 82832
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Basic informationNames & identifiersPropertiesSafety & regulationChemistry & industryRelated reactionsCompound notes
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Basic information

CAS
12033-62-4
Standard SMILES
[N]#[Ta]
InChIKey
MZLGASXMSKOWSE-UHFFFAOYSA-N
Molecular formula
NTa
Average molar mass
194.955 g/mol
Monoisotopic mass
194.95107

Names & identifiers

Preferred name
Tantalum nitride (TaN)
IUPAC
azanylidynetantalum
English name
TANTALUM NITRIDE
Molecular formula
NTa
Molecular weight
194.95

Names & synonyms

12033-62-4Tantalum nitride (TaN)EINECS 234-788-4DTXSID6065183RefChem:187400DTXCID0033592Tantalum nitrideazanylidynetantalumTantalum mononitrideSCHEMBL2266258Q415489Tantalum nitride, Tantalum mononitride, Tantalum nitride (TaN), 333204_ALDRICH, EINECS 234-788-4, 11116-09-9, 12033-62-4
Show more names
tantalumnitride(tan)Nanometer TaN Powdertantalum(III) nitrideTantalum Nitride , powder (TaN)TANTALUM NITRIDE, <5 MICRON, 99.5%TANTALUM NITRIDE ISO 9001:2015 REACH

Database identifiers

CAS
12033-62-4
PubChem CID
82832
DTXSID
DTXSID6065183
EC Number
234-788-4
Nikkaji
J134.303C

Properties

Computed structural properties

Topological polar surface area
23.8 Ų
Hydrogen bond donors
0
Hydrogen bond acceptors
1
Rotatable bonds
0
Heavy atoms
2
Formal charge
0
Complexity
10

Experimental & physicochemical properties

Chemical ClassesMetals -> Metals, Inorganic Compounds
SpringerMaterials Propertieselectron density of states
Physical DescriptionBlack solid; [HSDB] Purple powder; [Sigma-Aldrich MSDS]

Physicochemical properties

Melting point
3360 °C · 3360°C
Density
14.6 g/cm3 · 14.6 g/cm3
solubility
2 O; · insoluble in H2O; slightly soluble in aquaregia; reacts with alkaline solutions
form
Powder
color
black hexagonal, hexane crystals, crystalline
Resistivity
128 · 128–135 (ρ/μΩ.cm)
Water Solubility
Insoluble in water.
Thermal Conductivity
10.46 W/ · 10.46 W/(m·K)
Crystal Structure
Hexagonal
CAS DataBase Reference

Safety & regulation

Safety information is for reference only and does not replace the supplier’s Safety Data Sheet (SDS), applicable regulations, or professional assessment.

GHS classification

GHS Classification · 3 items

This chemical does not meet GHS hazard criteria for 100% (3 of 3) of all reports.

Not Classified

Aggregated GHS information provided per 3 reports by companies from 1 notifications to the ECHA C&L Inventory.

Hazard information

Hazards SummaryMay cause irritation; [Sigma-Aldrich MSDS] See Tantalum, metal and tantalum oxide, dust. See NITRIDES.
Hazard Classes and CategoriesNot Classified

Safety data

wgk
3
tsca
TSCA listed

Chemistry & industry

Uses & manufacturing

General Manufacturing InformationTantalum nitride (TaN): ACTIVE
Applications · 1 item

UsesTantalum nitride is used to create barrier or "glue" layers between copper, or other conductive metals, and dielectric insulator films such as thermal oxides. These films are deposited on top of silicon wafers during the manufacture of integrated circuits, to create thin film surface mount resistors and has other electronic applications.

Upstream & downstream products

Upstream raw materials

Tantalum(V) chlorideLithium amide

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Compound notes

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On this pageBasic informationNames & identifiersPropertiesSafety & regulationChemistry & industryRelated reactionsCompound notes
12033 · 12033-62-4(CAS DataBase Reference)
EPA Substance Registry System
Tantalum nitride (TaN) (12033-62-4)
WGK Germany
3 · 3
TSCA
TSCA listed