CAS 13465-77-5 Hexachlorodisilane (HCID 83497)

Names & identifiers

Preferred name: Hexachlorodisilane
IUPAC: trichloro(trichlorosilyl)silane
English name: Hexachlorodisilane
Molecular formula: Cl6Si2
Molecular weight: 268.89

Names & synonyms

Hexachlorodisilane13465-77-5Disilane, hexachloro-1,1,1,2,2,2-Hexachlorodisilanetrichloro(trichlorosilyl)silaneSi2Cl6MFCD00011599Disilane, 1,1,1,2,2,2-hexachloro-9Z754456JMCl6Si2hexachloro-disilaneEINECS 236-704-1

Show more names

HCDSorodisiLDKFELEX0292HexachlordisilanHeaxhlorodisilanehexachloro-disilanHCDS (99.9999% - Si)

Hexachlorodisilane, 96%SCHEMBL72016DTXSID0065488UNII-9Z754456JMAKOS0158486231,1,1,2,2,2-Hexachlorodisilane #AS-85588H1028

Database identifiers

CAS: 13465-77-5
PubChem CID: 83497
DTXSID: DTXSID0065488
UNII: 9Z754456JM
EC Number: 236-704-1
Nikkaji: J106.046E

Properties

Computed structural properties

Topological polar surface area: 0 Å²
Hydrogen bond donors: 0
Hydrogen bond acceptors: 0
Rotatable bonds: 0
Heavy atoms: 8
Formal charge: 0
Complexity: 61

Experimental & physicochemical properties

Physical Description · 2 items

CBI; Liquid

Clear to straw-colored liquid with an acrid odor of hydrogen chloride; [Matheson Tri-Gas MSDS]

Physicochemical properties

Melting point: 0 °C · <0°C
Boiling point: 144 · 144-145.5 °C (lit.)
Density: 1.562 g/mL · 1.562 g/mL at 25 °C (lit.)
vapor pressure: 2.8 hPa · 2.8hPa at 25℃
refractive index: 20 · n20/D 1.475(lit.)
Flash point: 78 °C · 78°C
storage temp.: 5 ° · below 5° C
solubility: 3 · sol CHCl3, CH2Cl2, benzene, THF; reacts violently, producing toxic fumes, with H2O, alcohols.
form: liquid
Specific Gravity: 1.562 · 1.562
color: Colorless to Almost colorless
Hydrolytic Sensitivity: 8 · 8: reacts rapidly with moisture, water, protic solvents
Stability: Stable, but reacts violently with water. Moisture sensitive. May be shock sensitive. Incompatible with water, moisture, acids, strong bases, oxidizing agents, alcohols.
InChI: 1S/Cl6Si2/c1-7(2,3)8(4,5)6
InChIKey: LXEXBJXDGVGRAR-UHFFFAOYSA-N
SMILES: Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl
CAS DataBase Reference: 13465 · 13465-77-5(CAS DataBase Reference)
FDA UNII: 9 Z754456JM · 9Z754456JM
EPA Substance Registry System: Disilane, hexachloro- (13465-77-5)
UNSPSC Code: 12352103 · 12352103
NACRES: 23 · NA.23
Symbol(GHS): 5 · GHS05
Signal word: Danger
Hazard statements: 314 · H314
Precautionary statements: 280 · P280-P303+P361+P353-P304+P340+P310-P305+P351+P338-P363-P405
PPE: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
Hazard Codes: C
Risk Statements: 14 · 14-34
Safety Statements: 26 · 26-36/37/39-45
RIDADR: 2987 · UN 2987 8/PG 2
WGK Germany: 3 · 3
F: 3 · 3-10-21
TSCA: TSCA listed
HazardClass: 8 · 8
PackingGroup: II
HS Code: 28121049 · 28121049
Storage Class: 8 A · 8A - Combustible corrosive hazardous materials
Hazard Classifications: 1 B · Skin Corr. 1B
REACH Registrations: Active

Safety & regulation

GHS classification

GHS Classification · 5 items

Danger

H225 (18.4%): Highly Flammable liquid and vapor [Danger Flammable liquids]；H314 (100%): Causes severe skin burns and eye damage [Danger Skin corrosion/irritation]

P210, P233, P240, P241, P242, P243, P260, P264, P280, P301+P330+P331, P302+P361+P354, P303+P361+P353, P304+P340, P305+P354+P338, P316, P321, P363, P370+P378, P403+P235, P405, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 147 reports by companies from 8 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.；Information may vary between notifications depending on impurities, additives, and other factors. The percentage value in parenthesis indicates the notified classification ratio from companies that provide hazard codes. Only hazard codes with percentage values above 10% are shown. For more detailed information, please visit ECHA C&L website.

Hazard information

Regulatory Information · 3 items

Chemical: Disilane, hexachloro-

Disilane, 1,1,1,2,2,2-hexachloro- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Disilane, 1,1,1,2,2,2-hexachloro- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

Status: Active Update: 31-05-2018 https://echa.europa.eu/registration-dossier/-/registered-dossier/19736

Hazards Summary · 1 item

May form explosive byproducts on prolonged storage; May explode on contact with water; Readily hydrolyzes forming hydrochloric acid; Causes burns; Inhalation may cause corrosive injuries to upper respiratory tract and lungs; [Matheson Tri-Gas MSDS]

Hazard Classes and CategoriesFlam. Liq. 2 (18.4%)；Skin Corr. 1A (100%)

Safety & protection

Exposure Control and Personal Protection · 1 item

TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016].

Toxicology

Adverse EffectsDermatotoxin - Skin burns.；Toxic Pneumonitis - Inflammation of the lungs induced by inhalation of metal fumes or toxic gases and vapors.

Regulatory information

Regulatory Information · 3 items

Chemical: Disilane, hexachloro-

Disilane, 1,1,1,2,2,2-hexachloro- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Disilane, 1,1,1,2,2,2-hexachloro- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

Status: Active Update: 31-05-2018 https://echa.europa.eu/registration-dossier/-/registered-dossier/19736

Safety data

F: 3-10-21
PPE: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
wgk: 3
tsca: TSCA listed
ridadr: UN 2987 8/PG 2
hs_code: 28121049
risk_code: 14-34
Signal word: Danger
Symbol(GHS): GHS05
hazard_code: C
safety_code: 26-36/37/39-45
hazard_class: 8
Storage Class: 8A - Combustible corrosive hazardous materials
packing_group: II
Hazard statements: H314
REACH Registrations: Active
Hazard Classifications: Skin Corr. 1B
Precautionary statements: P280-P303+P361+P353-P304+P340+P310-P305+P351+P338-P363-P405

Chemistry & industry

Uses & manufacturing

Uses · 2 items

Used in semiconductor processing; [Matheson Tri-Gas MSDS]

Semiconductor Manufacturing [Category: Industry]

U.S. Production2023: 75,000 - <500,000 lb；2022: 75,000 - <500,000 lb；2021: 75,000 - <500,000 lb；2020: 75,000 - <500,000 lb

Industry UsesOther；Intermediate

General Manufacturing Information · 2 items

Computer and Electronic Product Manufacturing；All Other Basic Inorganic Chemical Manufacturing

Disilane, 1,1,1,2,2,2-hexachloro-: ACTIVE

Applications

UsesHexachlorodisilane can be used in deoxygenation and desulfurization of phosphine oxides, phosphine sulfides, and amine oxides; reducing agent for nitro groups and sulfur diimides.

General DescriptionHexachlorodisilane (HCDS) is a chlorosilane used as a precursor for producing disilanes. It is a dioxidizer that is used in the production of silicon films and silicon nitride based films.

Preparation methods

PreparationHexachlorodisilane is prepared in the chlorination of silicides such as e.g. calcium silicide. Idealized syntheses are as follows: CaSi2 + 4 Cl2 → Si2Cl6 + CaCl2