Indium oxide → Indium oxide samarium oxide

HRID 1771006Notes

Reaction equation

[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[O-2].[Sm+3:7].[O-2].[O-2].[Sm+3]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[O-2:1].[Sm+3:7].[O-2:1].[O-2:1].[Sm+3:7]

Participants

Reactant 2

HCID 150905Indium oxide

HCID 159425Samarium oxide (Sm2O3)

Product 1

HCID 131731697Indium oxide samarium oxide

Procedure

Except that a spattering target containing indium oxide and samarium oxide (molar ratio of In:Sm=90:10) was used, indium oxide-samarium oxide (ISmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1. [Evaluation of ISmO thin films of Example 1-9 and Comparative 1-9]

Sources & evidence

ORD record: ord-97421e3459194d7186a29194cf399963
Source dataset: uspto-grants-2016_02
DOI: 10.6084/m9.figshare.5104873.v1
Patent number: US09249032B2

Reaction notes

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