基本情報
- 標準SMILES
[SiH4]- InChIKey
BLRPTPMANUNPDV-UHFFFAOYSA-N- 分子式
- H4Si
- 平均分子量
- 32.117 g/mol
- 単同位体質量
- 32.00822666
概要
Silane is a colorless, flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Silane is lighter than air. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. It is used in the production of amorphous silicon.
名称と識別子
- 優先名称
- Silane
- IUPAC
- silane
- 現地名
- テトラヒドリドけい素
- 英語名
- Silicon tetrahydride
- 分子式
- H4Si
- 分子量
- 32.12
名称と別名
名称をさらに表示
データベース識別子
- CAS
50808-20-3、7803-62-5- PubChem CID
- 23953
- DTXSID
DTXSID6052534- ChEBI
CHEBI:29389- UNII
- 5J076063R1
- EC Number
- 232-263-4
物性
構造計算による物性
- 極性表面積
- 0 Ų
- 水素結合供与体数
- 0
- 水素結合受容体数
- 0
- 回転可能結合数
- 0
- 重原子数
- 1
- 形式電荷
- 0
- 複雑度
- 0
実験および物理化学的性質
Chemical Classes
Toxic Gases & Vapors -> Hydrides
Flammable agents - 4th degree
Odor
Repulsive odor
Characteristic odor
Density
0.68 at -185 °C (liquid)
0.68 @ 185°C
1.11(relative gas density)
Solubility
Decomposes (NIOSH, 2024)
Slowly decomp in water; practically insol in alc, ether, benzene, chloroform, silicochloroform and silicon tetrachloride; decomp in potassium hydoxide solns.
Solubility in water: slow reaction
Decomposes
Boiling Point
-169 °F at 760 mmHg (NIOSH, 2024)
-112 °C
-112 °C
-169 °F
-112 °C @760 [mm Hg]
-169 °F
Decomposition
When heated to decomposition it burns or explodes.
The silanes decomp at elevated temp to liberate hydrogen and deposit a high purity silicon, which leads to some of the principal uses of silanes. /Silanes/
... Decomposes at 752 °F (400 °C) with release of silicon fumes and hydrogen.
Melting Point
-301 °F (NIOSH, 2024)
-185 °C
-185 °C
-301 °F
-185 °C
-301 °F
Vapor Density
1.11 (NIOSH, 2024) - Heavier than air; will sink (Relative to Air)
Relative vapor density (air = 1): 1.3
1.11
Vapor Pressure
greater than 1 atm (NIOSH, 2024)
>1 atm
>1 atm
物理化学的性質
- 融点
- -185 °C · -185 °C
- 沸点
- -112 °C · -112 °C
- 比重(密度)
- 1.114 g/mL · 1.114 g/mL at 25 °C(lit.)
- 蒸気密度
- 1.1 · 1.1 (vs air)
- 蒸気圧
- 100 kPa · 100kPa at 20℃
- 溶解性
- 2 O; · reacts with H2O; insoluble in ethanol,benzene
- 外見
- 無色のガス
- 比重
- 0.68 · 0.680
- 色
- colorless gas; flammable
- 臭い (Odor)
- 嫌な臭い
- 水溶解度
- 2 O · H2O によって分解されます。不溶性アルコール、ベンゼン [HAW93]
- 比熱容量
- 1.33 J/ · Cp(gas): 1.33 J/(g·K), at 25℃
- Merck
- 13 · 13,8562
- EPAの化学物質情報
- Silane (7803-62-5)
化学的性質
化学的特性Silicon tetrahydride is a highly toxic gas with a repulsive odor. It is spontaneously flammable in air. Trichlorosilane has an acrid odor, fumes in air and supports combustion. It is a lachrymator and is moisture sensitive. Octamethyl tetrasilane is moisture sensitive.
化学性质毒性が強く,空気に触れると発火する
安全と法規制
GHS分類
GHS Classification
This chemical does not meet GHS hazard criteria for 3.3% (5 of 151) of reports.
Danger
H220 (96.7%): Extremely flammable gas [Danger Flammable gases]
P203, P210, P222, P280, P377, P381, P403, and P410+P403 (click each P-code to see the statement)
Aggregated GHS information provided per 151 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.
Danger
危険有害性情報
Regulatory Information
Chemical: Silane
Silane is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Silane are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)
Status: Active Update: 05-09-2022 https://echa.europa.eu/registration-dossier/-/registered-dossier/1963
Silane: HSNO Approval: HSR001012 Approved with controls
The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)
Fire Hazards
Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:
· EXTREMELY FLAMMABLE.
Extremely flammable. Gas/air mixtures are explosive.
Fire Potential
Silicone hydride will ignite in air by slightly raising the temp or lowering the pressure.
... /Silane/ is mildly endothermic ... Pure material is said not to ignite in air unless the temp be incr or the pressure reduced. Presence of other hydrides as impurities causes ignition always to occur on contact. However, 99.95% pure material, even at concn down to 1% in hydrogen and/or nitrogen, ignites in contact with air unless emerging at very high gas velocity, when mixtures with up to 10% silane content may not ignite. Silane from a cylinder at 24 bar contained inside a ventilated cabinet inadvertently flowed back to the low pressure side of a nitrogen cylinder regulator outside the cabinet. When the regulator failed, the leaking silane ignited and burned outside the cabinet, preventing access to the main silane valve, and the leak reignited after extinguishing the fire. The system has been redesigned to eliminate the problems.
Pyrophoric. Flammable gas. Low ignition energy ...
Extremely flammable ... /Silane/ decomposes on heating or on burning producing silicon and hydrogen, causing fire and explosion hazard ...
Health Hazards
Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:
· Vapors may cause dizziness or asphyxiation without warning, especially when in closed or confined areas.
Hazards Summary
Silicon tetrahydride may ignite spontaneously in air. Toxicology data is extremely limited. The TLV is based on the subacute effects in rodents at 1000 ppm. Silane has low acute toxicity in inhalation animal experiments. The estimated LC50 is between 5,000 and 10,000 ppm for 4-hour exposures. [ACGIH] Explosions, fire, and asphyxiation in confined spaces are the most important hazards of silane. [Sullivan, p. 962] A skin, eye, and respiratory tract irritant; Evaporating liquid can cause frostbite; [ICSC]
DOT ID and Guide
2203 116
2203 116
Special Reports
Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.
Moskowitz PD et al; p.97-113 in Hazard Assessment and Control Technology in Semiconductor Manufacture (1989)
安全と保護具
Fire Fighting
Excerpt from ERG Guide 116 [Gases - Flammable (Unstable)]:
Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out. In other cases extinguish with powder, carbon dioxide. Combat fire from a sheltered position.
First Aid Measures
Fresh air, rest. Refer for medical attention.
ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower.
First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.
Accidental Release Measures
· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.
· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area.
First Aid
Excerpt from NIOSH Pocket Guide for Silicon tetrahydride:
General First Aid:
(General first aid procedures)
Firefighting Hazards
... React slowly with water ... A harmful concentration of this gas in the air will be reached very quickly on loss of containment.
Closed containers may rupture violently when heated.
Fire Fighting Procedures
Use fine spray or fog to control fire by preventing its spread and absorbing some of its heat. Stop flow of gas before extinguishing fire. Use water spray to keep fire-exposed containers cool. Do not use halocarbons. Explosive decomposition may occur under fore conditions. Fight fire from protected location or maximum possible distance. Approach fore from upwind to avoid hazardous vapors and toxic decomposition products.
If material on fire or involved in fire: Do not extinguish fire unless flow can be stopped. Do not apply water to point of leak in tank car or container. Use water in flooding quantities as fog. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Use "alcohol" foam, dry chemical or carbon dioxide.
Evacuation: If fire becomes uncontrollable or container is exposed to direct flame - consider evacuation of one-third (1/3) mile radius.
Shut off supply; if not possible and no risk to surroundings, let the fire burn itself out; in other cases extinguish with powder, carbon dioxide.
Storage Conditions
Fireproof.
Store in a cool, dry, well ventilated location. Separate from alkalies, oxidizing materials, halogens, and air. Outside or detached storage is preferred.
Cleanup Methods
Evacuate danger area! Consult an expert! Ventilation. Remove gas with fine water spray (extra personal protection: self-contained breathing apparatus).
Stop or control the leak, if this can be done without undue risk. Use water spray to cool and disperse vapors and protect personnel. Releases may ignite spontaneously.
Disposal Methods
SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.
毒性情報
Exposure Routes
The substance can be absorbed into the body by inhalation.
inhalation
Signs and Symptoms
Cough. Headache. Nausea. Sore throat.
Redness. ON CONTACT WITH LIQUID: FROSTBITE.
Redness. Pain.
irritation eyes, skin, mucous membrane; nausea, headache
Non-Human Toxicity Excerpts
/LABORATORY ANIMALS: Acute Exposure/ In mice, 4 out of 10 animals died following exposure to 9,600 ppm (approx 13,345 mg/cu m) for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]
/LABORATORY ANIMALS: Acute Exposure/ Rats exposed at 126 ppm for 1 hr were apparently unaffected.[American Conference of Governmental Industrial Hygienists. Documentation of the TLV's and BEI's with Other World Wide Occupational Exposure Values. CD-ROM Cincinnati, OH 45240-1634 2005., p. 1]
/LABORATORY ANIMALS: Acute Exposure/ ... Male ICR mice (n=10/group) were exposed to approximately 1,000 ppm (approx. 1,390 mg/cu m) of silane for 1 hour or 2, 4, or 8 hours. After sacrifice 3 days postexposure, the organs were examined grossly, and histologically (all exposed and non-exposed mice: nasal cavity, lung, liver, kidney, spleen, thymus, bone marrow, and testis; some of the mice: cornea, trachea, thyroid, salivary glands, and oesophagus). Biochemical and hematological parameters examined included alkaline phosphatase, aspartate and alanine aminotransferase, cholinesterase, blood urea nitrogen, sodium, potassium, red blood cell count, and total and differential white blood cell counts. Neither mortality nor exposure-related changes in any of the organs were observed. Biochemical or hematological parameters affected included an increase in red blood cell counts in mice exposed for 8 hours, an increase in blood urea nitrogen in mice exposed for 1 hour and a decrease in the 8-hour exposure group, and a decreased white blood cell count after 1-hour exposure.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]
/LABORATORY ANIMALS: Acute Exposure/ When male ICR mice were exposed to 2,500, 5,000, 7,500, or 10,000 ppm (approx 3,475, 6,950, 10,425, 13,900 mg/cu m) for 30 minutes, 1 hour, or 4 hours, only in the animals exposed to 10,000 ppm for 4 hours, mortality (ie, 9/12; all within 24 hr) was observed. At autopsy of these animals, increased relative kidney weights, renal tubular necrosis, splenic atrophy, appearance of macrophages with debris of degenerated cells in bone marrow and thymus, and inflammatory changes of the nasal mucosa was seen. In the groups exposed for 30 minutes or 1 hour and sacrificed at week 2, mainly effects on the kidneys were found (tubular interstitial nephrosis in 6/8 and 7/8 animals, respectively). Following exposure to 7,500 ppm (only 30-min exposure), tubular nephrosis was seen in 4/8 animals. The 1- and 4-hour exposures to 5,000 ppm caused tubular interstitial nephritis in 1/8 and 2/8 animals sacrificed at week 2, respectively, and acute renal tubular necrosis in 0/4 and 1/4 animals sacrificed after 2 days, respectively. Concerning the 2,500 ppm groups, the only effect observed was acute renal tubular necrosis in 1/4 animals exposed for 4 hours.[Health Council of the Netherlands: Committee on Updating of Occupational Exposure Limits. Silane; Health-based Reassessment of Administrative Occupational Exposure Limits. p.014-5. The Hague: Health Council of the Netherlands, 2000; 2000/15OSH/014.]
For more Non-Human Toxicity Excerpts (Complete) data for SILANE (6 total), please visit the HSDB record page.
Antidote and Emergency Treatment
Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Anticipate seizures and treat if necessary ... . Monitor for shock and treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... . Cover skin burns with sterile dressings after decontamination ... . /Silane, Chlorosilane, and Related Compounds/
Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Silane, Chlorosilane, and related compounds/
... ON FROSTBITE: rinse with plenty of water, do NOT remove clothes. Rinse skin with plenty of water or shower ... /For EYES:/ First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor.
Non-Human Toxicity Values
LC50 Rat inhalation 4000 ppm/4 hr
LD50 Rabbit subcutaneous 3540 mg/kg
LC50 Rat inhalation 9600 ppm/4 hr
法規制情報
DHS Chemicals of Interest (COI)
Silane
1
10000
Flammable chemical that can be released at a facility.
安全データ
- OEB
- B
- OEL
- TWA: 5 ppm (7 mg/m3)
- wgk
- 1
- tsca
- TSCA listed
- rtecs
- VV1400000
- ridadr
- UN 2203
- risk_code
- 12-17-20
- hazard_code
- F+,Xn
- safety_code
- 9-16-33-36/37/39
- hazard_class
- 2.1
- DOT Classification
- 2.1 (Flammable gas)
- 有毒物質データの
- 7803-62-5(Hazardous Substances Data)
化学と産業
薬理情報
用途と製造
Uses
Used as a source of silicon for semiconductors in the microelectronics industry; [ACGIH]
Semiconductor Manufacturing [Category: Industry]
Source of hyperpure silicon for semiconductors.
Doping agent for solid-state devices, production of amorphous silicon.
Silane is used largely as a raw material to form other silicon-containing compounds, but it also serves as a source of silicon for deposition of epitaxial layers.
U.S. Production
2023: 5,000,000 - <10,000,000 lb
(1982) > 9.07X10+6 g /est/
Production volumes for non-confidential chemicals reported under the Inventory Update Rule. [Table#5900]
Methods of Manufacturing
Prepared from aluminum silicide and hydrochloric acid or by electrolysis of an aqueous solution of sodium, ammonium, manganese, or ferrous chloride using an aluminum-silicon alloy as the positive pole; ... from magnesium silicide and HCl; ... from zinc silicide and acid; ... from lithium silicide and acid; ... from magnesium silicide and ammonium bromide or chloride in liquid ammonia; ... from lithium aluminum hydride in ether and silicon tetrachloride; ... from silica gel, aluminum oxide and hydrogen; ... from silicon tetrachloride and sodium aluminum hydride.
Silane is produced by combining an ether solution of silicon tetrachloride with an ether solution of lithium aluminum hydride.
At pressures of > MPa (400 atm), in the presence of aluminum & aluminum halides, silica can be converted to silane in high yields by reaction with hydrogen.
General Manufacturing Information
Computer and Electronic Product Manufacturing
Silane: ACTIVE
The parent silane cmpd is reported to have little application in industry; however, many of the derivatives have wide use.
応用分野
解説シラン,狭義では,SiH4のことをいう.SiH4(32.12).二酸化ケイ素に水素化アルミニウムリチウムLiAlH4を加え,150~170 ℃ に加熱するか,四塩化ケイ素SiCl4をLiAlH4で還元すると得られる.大規模には,SiO2にアルミナAl2O3を加え,高温·高圧化で水素還元してつくる.不快臭のある気体.密度0.68 g cm-3(-185 ℃,液体).融点-185 ℃,沸点-112 ℃.室温では安定である.300 ℃ 付近から分解がはじまる.分解は光で促進される.400 ℃ で完全にSiと H2 に分解する.空気中で高温では発火する.Cl2 とまぜると爆発的に反応してSiCl4を生じる.水で徐々に加水分解する.アルコール類,エーテル,CHCl3などに不溶.還元性があり,CuSO4をCu2Siに,AgNO3をAgに還元する.高純度のケイ素製造の原料となる.
用途シリコンのエピタキシャル成長、ポリシリコン、酸化シリコン、窒化シリコンなどの原料 半導体用特殊ガスの中では最も多量に使用されている
説明Silane is a colorless, spontaneously flammable (pyrophoric) gas. It has a choking odor and may form explosive mixtures with air. Silane will react violently with heavy metal halides and free halogens other than hydrogen chloride.
使用Source of hyperpure silicon for semiconductors.
一般的な説明Silicon tetrahydride is a colorless, flammable and poisonous gas, with a strong repulsive odor. Silicon tetrahydride is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Silicon tetrahydride is lighter than air. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Silicon tetrahydride is used in the production of amorphous silicon.
使用用途モノシラン (SiH4) は、高い反応性を持つ無機化合物であり、さまざまな用途で利用されています。特に半導体産業での利用が代表的です。 具体的には、CVDでシリコン膜を形成する用途で用いられます。CVDとは、大気圧中に特殊ガスを噴射して被膜を形成するコーティング技術です。噴射したガスにエネルギーを加える方法や、複数種類のガスを相互作用させる方法などがあります。モノシランを使ったCVDでは、噴射したモノシランに電気エネルギーを与える被膜形成などが行われています。 この技術はシリコンウェハーの製造や、金属酸化物半導体 (MOS) デバイスのゲート酸化膜の成長などの工程で利用されます。この用途に加えて、モノシランは研究や開発の分野でも使用されており、新しい応用が開拓されています。 ただし、モノシランは大気に触れただけで自然発火をするため、取り扱いには注意が必要です。
使用用途シランは、半導体シリコンの原料であり、工業用材料として重要なものです。420 ℃以上でシランがケイ素 (Si) と水素 (H) へ分解するため、シリコンの化学蒸着に使うことができます。 また、ジメチルクロロシラン ((CH3)2SiHCl) は、シリル化剤やシランカップリング剤などの原料となります。これらは、有機質材料と無機質材料とを結びつける重要な役割を果たしており、医薬品合成や合成樹脂、接着剤、ガラス繊維など、様々な用途で利用されています。
調製方法
製造方法モノシランにはいくつかの製造方法が存在しますが、工業的に最も一般的な製造方法は粉砕したシリコンを用いる方法です。 この方法では、表面積を増やし反応速度を上げるためシリコンを粉末状にし、ナトリウム、カリウムなどのアルカリ金属と混ぜ合わせます。その後、混合物に塩酸ガスを通して反応させることで、モノシランが生成されます。 Si + 4HCl + 4Na → SiH4 + 4NaCl 生成されたモノシランは、ガスとして分離・精製されます。その他、シリコンと水素を高温・高圧の条件下で直接反応させることで、モノシランを生成する方法もあります。ただし、この方法は生成効率が低く、エネルギー消費が大きいため、現在ではあまり用いられていません。 参考文献
製造方法金属ケイ素 (Si) と (HCl) との反応で主に生成する (SiHCl3) を、触媒を用いた不均化反応によって、ジクロロシラン (SiH2Cl2) 、テトラクロロシラン (SiCl4) 、モノクロロシラン (SiH3Cl) 、シランの混合物を得ます。その後、蒸留によって精製分離することでシランが製造されます。 その他シランの工業的製造法としては、クロロシランやテトラエトキシシラン ((CH3CH2O)4Si) を還元する方法、ケイ化マグネシウム (Mg2Si) とアンモニウム塩とを反応させる方法、トリアルコキシシラン (RO3SiH) を不均化する方法などが知られています。
合成方法シリコン粉末と四塩化シリコンを水素中で加熱反応させて三塩化シランとし,次に不均化反応を繰り返して製造する
上流・下流製品情報
上流原料
下流製品
サプライヤー42 社
補足説明
定義ChEBI: The simplest silane, consisting of a single silicon atom carrying four hydrogens.
関連反応
関連ノート
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