7783-54-2FN(F)FGVGCUCJTUSOZKP-UHFFFAOYSA-NNitrogen trifluoride appears as a colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.
7783-54-2DTXSID4040181CHEBI:30231Moldy odor
High purity nitrogen trifluoride has little odor, but material contaminated with traces of active fluorides may have a pungent, musty odor.
2.902 g/L
Liquid density = 1.533 at -129 °C; Heat of formation = -131.5 kJ/mol; Heat capacity = 53.39 J/(mol*K)
Relative density (water = 1):
2.9 g/L
2.46(relative gas density)
Slight (NIOSH, 2024)
Water solubility = 1.4X10-5 mol NF3/mol H2O at 25 °C and 101.3 kPa
Insoluble in water
Solubility in water: none
Slight
-200 °F at 760 mmHg (NIOSH, 2024)
-128.75 °C
Trouton constant: 19.9; decomposed by electric sparks; inert chemically; liquid at boiling point
安全情報は参考情報です。供給元の安全データシート(SDS)、適用法令、専門家による評価に代わるものではありません。
Danger
H270 (100%): May cause or intensify fire; oxidizer [Danger Oxidizing gases]
P220, P244, P260, P261, P271, P304+P340, P317, P319, P370+P376, P403, P410+P403, and P501 (click each P-code to see the statement)
Aggregated GHS information provided per 87 reports by companies from 4 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.
Danger
H270: May cause or intensify fire; oxidizer [Danger Oxidizing gases]
Nitrogen fluoride (NF3) is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Nitrogen fluoride (NF3) are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)
REACH registered substance: Nitrogen trifluoride (EC: 232-007-1)
The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)
Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]:
· Substance does not burn but will support combustion.
Not combustible but enhances combustion of other substances. Gives off irritating or toxic fumes (or gases) in a fire. Heating will cause rise in pressure with risk of bursting.
This material is a nonflammable gas.
A very dangerous fire hazard; a very powerful oxidizer; otherwise inert at normal temperatures and pressures. Reacts violently when ignited with /hydrogen/.
Not combustible but enhances combustion of other substances.
Used in high-energy fuels and in chemical synthesis; [ACGIH]
Semiconductor Manufacturing [Category: Industry]
Chamber-cleaning gas in the manufacture of electronics.
Nitrogen trifluoride is preferred to F2 in high-power chemical lasers because of its ease of handling at ambient temperatures. ... Minor uses have been mentioned in the literature: plasma etching of semiconductor materials, production of perfluoroammonium salts, a proposed gas filler to increase the life and brightness of lamps, and as an oxidizing agent in rocketry (not yet commercialized).
The principal use of NF3 is as a fluorine source in the electronics industry.
Oxidizer for high-energy fuels, chemical synthesis.
2023: 1,000,000 - <5,000,000 lb
Production is less than 100 t/yr in the United States
Non-confidential 2012 Chemical Data Reporting (CDR) information on the production and use of chemicals manufactured or imported into the United States. Chemical: Nitrogen fluoride. National Production Volume: Withheld.
Manufactured by direct fluorination of NH3 or NH4.HF by F2 or by electrolysis of ammonium fluoride-hydrogen fluoride melts.
Only two processes have been technically and economically feasible for large-scale production: the electrolysis of molten ammonium acid fluoride; and the direct fluorination of the ammonia in the presence of molten ammonium fluoride. In the electrolytic process, NF3 is produced at the anode and H2 is produced at the cathode. In a divided cell of 4 kA having nickel anodes, extensive dilution of the gas streams with N2 was used to prevent explosive reactions between NF3 and H2. In the direct process, NF3 is produced by the reaction of NH3 and F2 in the presence of molten ammonium acid fluoride. The process uses a specially designed reactor. Because H2 is not generated in this process, the hazards associated with the reactions between NF3 and H2 are eliminated.
現在のフィルター条件では反応記録がありません。
読み込み中…
-129 °C
-200 °F
-129 °C @760 [mm Hg]
Decomposed by electric sparks.
When heated to decomposition it emits highly toxic fumes of /flouride/.
-340 °F (NIOSH, 2024)
-208.79 °C
Heat of fusion at the melting point = 3.9794x10+5 J/kmol
-208.5 °C
-343.8 °F
-206.79 °C
2.46 (NIOSH, 2024) - Heavier than air; will sink (Relative to Air)
2.902
greater than 1 atm (NIOSH, 2024)
33,400 mm Hg at 233 K
>1 atm
>1 atm
化学的特性窒素三フッ化物化学式NF3は無色で非常に反応性の高い気体であり特に半導体産業での使用が知られていますその化学的性質と用途の多様性により科学者や工業技術者の間で注目されている化合物です
化学的特性Nitrogen trifluoride is a colorless gas. Moldy odor. Shipped as a nonliquefied compressed gas.
化学性质融点?207℃,沸点?129℃,水に難溶
Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]:
· Vapors may cause dizziness or asphyxiation without warning, especially when in closed or confined areas.
Causes liver/kidney injury in rats exposed to 100 ppm 7 hours/day, 5 days a week for 19 weeks; No fluorosis of teeth or bones in these animals; Listed in the table Examples of Industrial Chemicals for Which Methemoglobin Formation is NOT the Principal Cause of Toxicity; [ACGIH] May cause fluorosis after high, prolonged, and repeated exposures; [ICSC] Rats died from exposure to 10,000 ppm for 60 to 70 minutes; the methemoglobin concentrations at the time of death were equivalent to 60 to 70% of available hemoglobin. Animals exposed to nearly lethal concentrations suffered severe respiratory distress and cyanosis due to methemoglobinemia; severely affected animals showed incoordination, collapse and convulsions. [NIOSH Guidelines for Chemical Hazards] See FLUORIDES.
2451 122
2451 122
NITROGEN TRIFLUORIDE is a very powerful oxidizing agent. Presents dangerous fire hazard in the presence of reducing agents. Etches glass in the presence of moisture. Emits toxic and corrosive fumes of fluoride when heated to decomposition [Lewis, 3rd ed., 1993, p. 937]. Can react violently with hydrogen, ammonia, carbon monoxide, diborane, hydrogen sulfide, methane, tetrafluorohydrazine, charcoal. Explosive reaction with chlorine dioxide. A severe explosion may occur when exposed to reducing agents under pressure [Bretherick, 5th ed., 1995, p. 1427].
Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]:
In case of fire in the surroundings, use appropriate extinguishing media. In case of fire: keep cylinder cool by spraying with water.
Fresh air, rest.
Remove contaminated clothes.
First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.
· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.
· Keep combustibles (wood, paper, oil, etc.) away from spilled material.
Excerpt from NIOSH Pocket Guide for Nitrogen trifluoride:
General First Aid:
(General first aid procedures)
Heating will cause rise in pressure with risk of bursting.
Poisonous gases, including fluorine, are produced in fire.
· Wear positive pressure self-contained breathing apparatus (SCBA).
Biological Exposure Indices (BEI) [ACGIH] - Methemoglobin in blood = 1.5% of hemoglobin during or at end of shift. [ACGIH]
Do not extinguish the fire unless the flow of gas can be stopped and any remaining gas is out of the line. Specially trained personnel may use fog lines to cool exposures and let the fire burn itself out. Vapors are heavier than air and will collect in low areas. Containers may explode in fire. Storage containers and parts of containers may rocket great distances, in many directions. If material or contaminated runoff enters waterways, notify downstream users of potentially contaminates waters. Notify local health and fire officials and pollution control agencies. From a secure, explosion-proof location, use water spray to cool exposed containers. If cooling streams are ineffective (venting sound increases in volume and pitch, tank discolors, or shows any signs of deforming), withdraw immediately to a secure location. ... The only respirators recommended for firefighting are self-contained breathing apparatuses that have full face-pieces and are operated in a pressure-demand or other positive-pressure mode.
If material on fire or involved in fire: Solid streams of water may be ineffective. Extinguish fire using agent suitable for type of surrounding fire (Material itself does not burn or burns with difficulty.) Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.
Turn leaking cylinder with the leak up to prevent escape of gas in liquid state.
Store separately in an area isolated from flammables, combustibles, or other yellow coded materials. ... High concentrations cause a deficiency of oxygen with the risk of unconsciousness or death. Check that oxygen content is at least 19% before entering storage or spill area.
If in a building, evacuate building and confine vapors by closing doors and shutting down HVAC systems. Restrict persons not wearing protective equipment from area of spill or leak until cleanup is complete. Remove all ignition sources. Ventilate area of spill or leak to disperse the gas. Wear chemical protective suit with self-contained breathing apparatus to combat spills. Stay upwind and use water spray to "knock down" vapor; contain runoff. Stop the flow of gas, if it can be done safely from a distance. If source is a cylinder and the leak cannot be stopped in place, remove the leaking cylinder to a safe place, and repair leak or allow cylinder to empty. Keep this chemical out of confined spaces, such as a sewer, because of the possibility of explosion, unless the sewer is designed to prevent the buildup of explosive concentrations.
Persons not wearing protective equipment and clothing should be restricted from areas of leaks until cleanup has been completed. ... 1. Ventilate area of leak to disperse gas. 2. Stop flow of gas. If source of leak is a cylinder and the leak cannot be stopped in place, remove the leaking cylinder to a safe place in the open air, and repair the leak or allow the cylinder to empty.
Gas leakage: Pass through a reducing agent (sodium bisulfite) and sodium bicarbonate solution with a trap in the line, when the valve can not be closed.
SRP: Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in air, soil or water; effects on animal, aquatic and plant life; and conformance with environmental and public health regulations. If it is possible or reasonable use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination.
Spillage Disposal: Ventilation. NEVER direct water jet on liquid. Personal protection: self-contained breathing apparatus.
SRP: At the time of review, criteria for land treatment or burial (sanitary landfill) disposal practices are subject to significant revision. Prior to implementing land disposal of waste residue (including waste sludge), consult with environmental regulatory agencies for guidance on acceptable disposal practices.
The substance can be absorbed into the body by inhalation.
inhalation
IDENTIFICATION AND USE: Nitrogen trifluoride is a colorless gas with a moldy odor. It is used as a chamber-cleaning gas in the manufacture of electronics. Nitrogen trifluoride is preferred to F2 in high-power chemical lasers because of its ease of handling at ambient temperatures. It is also an oxidizer for high-energy fuels, chemical synthesis. HUMAN EXPOSURE AND TOXICITY: Nitrogen trifluoride is a simple asphyxiant. Five volunteers were exposed to nitrogen trifluoride at concentrations of 100 and 500 ppm for 2 to 3 minutes. No odor was detected at 100 ppm, but one of the five reported the odor detectable at 500 ppm. ANIMAL STUDIES: Nitrogen trifluoride has a moderate acute inhalation toxicity causing anoxic deaths due to methemoglobinemia. Acute inhalation also results in slight histologic changes in the liver and kidneys of some rats and enlargement and darkening of the spleen. Serum glutamic-oxaloacetic transaminase levels in the rats were essentially unaffected after acute inhalation. Dogs surviving exposure at 9600 ppm for 60 minutes exhibited Heinz body-included hemolysis, anemia, decreased hematocrit, decreased hemoglobin, reduced red blood cell count, and clinical signs consistent with histotoxic anoxia as a result of methemoglobin formation. Rabbits that received 9 intraperitoneal injections of 10 mL of nitrogen trifluoride gas in 29 days showed enlarged spleens, pathologic changes in the liver, and myocardial degeneration.
The following medical procedures should be made available to each employee who is exposed to nitrogen trifluoride at potentially hazardous levels: A complete history and physical examination /should be performed/ to detect pre-existing conditions that might place the exposed employee at increased risk, and to establish a baseline for future health monitoring. Examination of the blood, cardiovascular system, nervous system, liver, and kidneys should be stressed; ... a complete blood count should be performed including a red cell count, a white cell count, a differential count of a stained smear, as well as hemoglobin and hematocrit. ... The aforementioned medical examinations should be repeated on an annual basis. Methemoglobin determinations should be performed if overexposure is suspected or signs and symptoms of toxicity occur.
Nitrogen trifluouride's production and use in high energy fuels and as a chemical intermediate(1) may result in its release to the environment through various waste streams(SRC).
Unlike many other greenhouse gases, fluorinated gases /such as nitrogen trifluoride/ have no natural sources and only come from human-related activities. They are emitted through a variety of industrial processes such as aluminum and semiconductor manufacturing. ... Like other long-lived greenhouse gases, fluorinated gases are well-mixed in the atmosphere, spreading around the world after they're emitted. Fluorinated gases are removed from the atmosphere only when they are destroyed by sunlight in the far upper atmosphere. In general, fluorinated gases are the most potent and longest lasting type of greenhouse gases emitted by human activities(1).
/LABORATORY ANIMALS: Acute Exposure/ Rats that had received single intraperitoneal injections of nitrogen trifluoride gas (8-15 mL/kg) became cyanotic and developed enlarged spleens, possibly as a secondary response to the methemoglobinemia.
/LABORATORY ANIMALS: Acute Exposure/ Nitrogen trifluoride has a moderate acute inhalation toxicity causing anoxic deaths due to methemoglobinemia. Acute inhalation also results in slight histologic changes in the liver and kidneys of some rats and enlargement and darkening of the spleen. Serum glutamic-oxaloacetic transaminase levels in the rats were essentially unaffected after acute inhalation.
/LABORATORY ANIMALS: Acute Exposure/ When rats inhaled 1000 ppm nitrogen trifluoride for 4 hours, a substantial increase in circulating methemoglobin was detectable; however, inhalation of 3000 ppm for 10 minutes failed to show such an effect. When rats inhaled 2500 ppm nitrogen trifluoride for 4 hours, deaths were commonplace. Eighty-seven percent of the rats died after inhalation of 10,000 ppm nitrogen trifluoride for 60 to 70 minutes; the methemoglobin concentrations at the time of death were equivalent to 60% to 70% of the total blood pigment.
/LABORATORY ANIMALS: Acute Exposure/ Dogs surviving exposure at 9600 ppm for 60 minutes exhibited Heinz body-induced hemolysis, anemia, decreased hematocrit, decreased hemoglobin, reduced red blood cell count, and clinical signs consistent with histotoxic anoxia as a result of methemoglobin formation.
For more Non-Human Toxicity Excerpts (Complete) data for NITROGEN TRIFLUORIDE (8 total), please visit the HSDB record page.
According to the 2012 TSCA Inventory Update Reporting data, 3 reporting facilities estimate the number of persons reasonably likely to be exposed during the manufacturing, processing, or use of nitrogen trifluoride in the United States may be as low as <10 workers per plant; the data may be greatly underestimated due to confidential business information (CBI) or unknown values(1).
NIOSH (NOES Survey 1981-1983) has statistically estimated that 1,096 workers (140 of these are female) were potentially exposed to nitrogen trifluoride in the US(1). Occupational exposure to nitrogen trifluoride may occur through inhalation and dermal contact with this compound at workplaces where nitrogen trifluoride is produced or used. (SRC)
Etchant grade (99.5%), technical (98.0%) grade
Commercial, VLSI, and Megaclass. /From table/
Computer and Electronic Product Manufacturing
Nitrogen fluoride (NF3): ACTIVE
解説フッ化窒素,無色の気体.三方両すい型分子.密度1.93 g cm-3(液体).F-N約1.37 Å.∠F-N-F約102°.融点-206.6 ℃,沸点-129.0 ℃.室温では安定である.高温では各種の金属や非金属と反応してフッ素化する.水に難溶.酸性・中性水溶液では反応は遅いが,アルカリ性水溶液または加熱すると,加水分解して亜硝酸塩とフッ化物になる.エッチング,高エネルギー燃料用酸化剤などに用いられる.有毒.森北出版「化学辞典(第2版)
用途半導体化学でプラズマエッチング液フッ化水素レーザー
説明Nitrogen trifluoride is a colorless gas with little odor. Nitrogen trifluoride is an oxidizer that is thennodynamically stable except at elevated temperatures. At temperatures up to about 482°F (250°C), its reactivity is comparable to oxygen. At higher temperatures, its reactivity is similar to fluorine owing to appreciable dissociation into NF2 and F-. The thennal dissociation of nitrogen trifluoride has been studied by a number of investigators and has been found to peak in the temperature range of 1100K to 1500K. In handling nitrogen trifluoride, conditions should be avoided that can result in high temperatures such as adiabatic compression from the rapid pressurization of a system. Nitrogen trifluoride acts primarily upon the elements as a fluorinating agent, but not a very active one at lower temperatures. At elevated temperatures, nitrogen trifluoride pyrolyzes with many of the elements to produce nitrogen tetrafluoride and the corresponding fluoride. The pyrolysis of nitrogen trifluoride over copper turnings produces nitrogen tetrafluoride in a 62 percent to 71 percent yield at 707°F (375°C). Pyrolysis over carbon is more complete.
使用Nitrogen trifluoride is an etchant and chamber cleaning agent. Oxidizer for high-energy fuels, chemical synthesis.
一般的な説明A colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.
製造方法Nitrogen trifluoride is prepared by electrolysis of either molten ammonium fluoride, NH4F, or melted ammonium acid fluoride, NH4HF2 (or ammonium fluoride in anhydrous HF). While the NH4F method is preferred because it forms nitrogen trifluoride as the only product, electrolysis of ammonium acid fluoride yields a small amount of dinitrogen difluoride, N2F2,and NF3. Also, nitrogen trifluoride can be prepared by reaction of ammonia with fluorine diluted with nitrogen in a reactor packed with copper. Other nitrogen fluorides, such as N2F2, N2F4, and NHF2 also are produced. The yield of major product depends on fluorine/ammonia ratio and other conditions.
Nitrogen trifluoride can be formed from a wide variety of chemical reactions. The commercial process for production involves direct fluorination of ammonia with fluorine gas in the presence ofammonium fluoride.
合成方法塩化窒素または窒素をフッ素と反応させる