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タングステン(VI)ヘキサフルオリド

Tungsten hexafluoride

HCID 522684
ノート反応
基本情報概要名称と識別子物性安全と法規制化学と産業関連反応化合物ノート
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基本情報

CAS
7783-82-6
標準SMILES
[F][W]([F])([F])([F])([F])[F]
InChIKey
NXHILIPIEUBEPD-UHFFFAOYSA-H
分子式
F6W
平均分子量
297.83 g/mol
単同位体質量
297.941352

概要

Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

名称と識別子

優先名称
Tungsten hexafluoride
IUPAC
hexafluorotungsten
現地名
タングステン(VI)ヘキサフルオリド
英語名
Tungsten hexafluoride
分子式
F6W
分子量
297.83

名称と別名

Tungsten hexafluorideHexafluorotungsten7783-82-6Tungsten fluoride (WF6), (OC-6-11)-Tungsten fluorideUNII-45B0AG2C4SHSDB 8038Tungsten fluoride (WF6)EINECS 232-029-1UN219645B0AG2C4SEC 232-029-1
名称をさらに表示
タングステン(VI)ヘキサフルオリド六ふっ化タングステンふっ化タングステン(VI)フッ化タングステン()(OC-6-11)-六フッ化タングステン(VI)フッ化タングステンWF6WFsmixed gasTungstenfluorideTUNGSTEN(VI) FLUORIDETungstenhexafluoride99%Wolfram(VI)hexafluorideTungsten hexafluoride 99%
DTXSID80893770UN 2196RefChem:192527DTXCID001323805TUNGSTEN HEXAFLUORIDE (WF6)232-029-1NXHILIPIEUBEPD-UHFFFAOYSA-HTUNGSTEN HEXAFLUORIDE [MI]

データベース識別子

CAS
7783-82-6
PubChem CID
522684
DTXSID

物性

構造計算による物性

極性表面積
0 Ų
水素結合供与体数
0
水素結合受容体数
6
回転可能結合数
0
重原子数
7
形式電荷
0
複雑度
62.7

実験および物理化学的性質

Chemical Classes · 2 件

Toxic Gases & Vapors -> Corrosive Gases

Corrosives

SpringerMaterials Propertiesphonon wavenumber
Density · 2 件

3.44 g/cu cm

13.069 @25 °C

Color/Form · 2 件

Yellow liquid or colorless gas

Orthorhombic, deliquescent crystals when solid

Solubility · 5 件

Reacts with water

Decomposes in water

Very soluble in carbon tetrachloride, cyclohexane

Solubility in anhydrous hexafluoride: 3.14 moles/1000 g HF

MIscible with many colvents (e.g. cyclohexane, carbon tetrachloride)

CorrosivityCorrosive liquid
Boiling Point · 3 件

67 °F

17.1 °C

17.5 °C @760 [mm Hg]

Melting Point · 3 件

37 °F

1.9 °C

2.3 °C

Heat of Vaporization26.5 kJ/mol at 17.1 °C
Physical Description · 3 件

安全と法規制

安全情報は参考情報です。供給元の安全データシート(SDS)、適用法令、専門家による評価に代わるものではありません。

GHS分類

GHS Classification · 6 件

Danger

H280 (100%): Contains gas under pressure; may explode if heated [Warning Gases under pressure]

P260, P262, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)

Aggregated GHS information provided per 142 reports by companies from 10 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.

Danger

H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]

危険有害性情報

Hazards IdentificationToxic/poison by inhalation (TIH/PIH)
Regulatory Information · 3 件

Tungsten fluoride (WF6), (OC-6-11)- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Tungsten fluoride (WF6), (OC-6-11)- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)

REACH registered substance: Tungsten hexafluoride (EC: 232-029-1)

The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)

DOT LabelPoison Gas Corrosive
Fire Hazards · 2 件

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

· Some may burn but none ignite readily.

Health Hazards · 2 件

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

· TOXIC and/or CORROSIVE; may be fatal if inhaled, ingested or absorbed through skin.

化学と産業

用途と製造

Uses · 4 件

Used in the application of tungsten coatings; Used in chemical synthesis; [NJ-HSFS]

Its major use is in chemical vapor deposition (CVD), which produces tungsten coatings on both conducting and insulating substrates.

In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.

Fluorinating agent

U.S. Production · 2 件

2023: 1,000,000 - <5,000,000 lb

Production volume for non-confidential chemicals reported under the 2006 Inventory Update Rule. Chemical: Tungsten fluoride. Aggregated National Production Volume: 500,000 to < 1 million lbs.

Consumer UsesOther
Industry UsesEtching agent
Methods of Manufacturing · 2 件

Manufactured by the direct action of elemental fluorine on solid powdered tungsten, e.g., in a flame reactor.

Prepared by direct fluorination of powdered tungsten. Can be purified by distillation, preferably under pressure.

General Manufacturing Information · 2 件

Computer and Electronic Product Manufacturing

Tungsten fluoride (WF6), (OC-6-11)-: ACTIVE

応用分野 · 3 件

説明Tungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3 . At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of 4.56 g/cm3 . In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm.

関連反応

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化合物ノート

読み込み中…

このページの内容基本情報概要名称と識別子物性安全と法規制化学と産業関連反応化合物ノート
DTXSID80893770
EC Number
232-029-1

Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

CBI; Gas Vapor; Liquid

Colorless gas or light-yellow liquid that decomposes in water; [Hawley]

Other Experimental Properties · 3 件

Critical volume: 233 cu cm/mol

Specific gavity: 3.551 at 15 °C/liquid

Hexane solutions often strongly colored

物理化学的性質

融点
2.3 °C · 2.3 °C(lit.)
沸点
17.5 °C · 17.5 °C(lit.)
比重(密度)
15 liq · d15liq 3.441
蒸気圧
10 hPa · 10hPa at 20℃
溶解性
2 O; · reacts with H2O; very soluble in ctc,cyclohexane
外見
無色のガス
色
yellow
水溶解度
分解する
比熱容量
0.4 J/ · Cp(gas): 0.4 J/(g·K), at 25℃
Merck
13 · 13,9885
InChI
InChI=1S/6FH.W/h6*1H;/q;;;;;;+6/p-6
InChIKey
NXHILIPIEUBEPD-UHFFFAOYSA-H
SMILES
[W](F)(F)(F)(F)(F)F
CAS データベース
7783 · 7783-82-6(CAS DataBase Reference)
NISTの化学物質情報
Tungsten hexafluoride(7783-82-6)
EPAの化学物質情報
Tungsten fluoride (WF6), (OC-6-11)- (7783-82-6)

化学的性質

化学的特性Tungsten hexafluoride is a toxic, colorless gas or a light yellow liquid.

Hazards SummaryHydrolyzes to HF after contact with water or moisture; Corrosive to skin, eyes, and respiratory tract; Inhalation can cause acute pulmonary edema; [CHEMINFO MSDS]
DOT ID and Guide2196 125
Reactive GroupFluoride Salts, Soluble
TSCA Requirements · 1 件

Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.

Reactivity AlertsWater-Reactive
Reactivity ProfileTUNGSTEN HEXAFLUORIDE emits very toxic and irritating fumes containing metallic tungsten and tungsten fluorides when heated to decomposition. Reacts violently with tetramethoxysilane [Jacob, E., Angew. Chem., 1982, 21, p. 143].
DOT Hazard Classification · 4 件

Tungsten hexafluoride

UN2196

Div 2.3 Poisonous gas (49 eCFR § 173.115)

Div 2.3 Poisonous gas (49 eCFR § 173.115)

安全と保護具

Fire FightingExcerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
Accidental Release Measures · 2 件

· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.

· Do not touch or walk through spilled material.

First Aid · 2 件

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

General First Aid:

Exposure Control and Personal Protection · 3 件

· Wear positive pressure self-contained breathing apparatus (SCBA).

Biological Exposure Indices (BEI) [ACGIH] - Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)

1.0 [mg/m3], as F, inhalable fraction[German Research Foundation (DFG)]

Fire Fighting Procedures · 1 件

If material involved in fire: Use dry chemical, dry sand, or carbon dioxide. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.

Storage ConditionsMay be stored in glass pressure ampuls.
Cleanup Methods · 4 件

Environmental considerations: Land spill: Dike surface flow using soil, sand bags, foamed polyurethane, or foamed concrete. Absorb bulk liquid with fly ash, cement powder, or commercial sorbents.

Environmental considerations: Water spill: Use natural deep water pockets excavated lagoons, or sand bag barriers to trap material at bottom. Remove trapped material with suction hoses.

Environmental considerations: Air spill: Vapor knockdown water is corrosive or toxic and should be diked for containment.

If material not involved in fire: Neutralize spilled material with crushed limestone, soda ash, or lime.

Nonfire Spill ResponseExcerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
Disposal Methods · 1 件

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.

Preventive Measures · 2 件

If material not involved in fire: Keep material out of water sources and sewers. Build dikes to contain low as necessary. Use water spray to knock-down vapors. Do not use water on material itself.

Personnel protection: Avoid breathing vapors. Keep upwind. Avoid bodily contact with the material. Do not handle broken packages unless wearing appropriate personal protective equipment. Wash away any material which may have contacted the body with copious amounts of water or soap and water. If contact with the material anticipated, wear appropriate chemical protective clothing.

Isolation and Evacuation · 4 件

Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:

Immediate precautionary measure

Small spill:

Small spill:

Threshold Limit Values (TLV) · 2 件

3.0 [mg/m3], as W, respirable particulate matter (2.5 mg/m3, as F)

8 hr Time Weighted Avg (TWA): 1 mg/cu m; 15 min Short Term Exposure Limit (STEL): 3 mg/cu m. /Tungsten soluble compounds/

毒性情報

Adverse EffectsDermatotoxin - Skin burns.
Probable Routes of Human Exposure · 1 件

According to the 2006 TSCA Inventory Update Reporting data, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use of tungsten hexafluoride is 1 to 99; the data may be greatly underestimated(1).

Antidote and Emergency Treatment · 5 件

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Fluorine and related compounds/

Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Monitor for shock and treat if necessary ... . Anticipate seizures adn treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patent can swallow, has a strong gag reflex, and does not drool. ... . Cover skin burns with dry sterile dressings after decontamination ... . /Fluorine and related compounds/

Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Positive-pressure ventilation techniques with a bag valve mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Fluorine and related compounds/

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Choking Agents (Pulmonary/Lung-Damaging Agents)/

For more Antidote and Emergency Treatment (Complete) data for Tungsten hexafluoride (6 total), please visit the HSDB record page.

Toxicity DataLC50 (rat) = 1,430 mg/m3

法規制情報

TSCA Requirements · 1 件

Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.

DHS Chemicals of Interest (COI) · 4 件

Tungsten hexafluoride

7.1

45

Weapons of Mass Effect chemical material that, if stolen or diverted, can be converted into weapons using simple chemistry, equipment, or techniques.

安全データ

wgk
3
tsca
TSCA listed
rtecs
YO7720000
ridadr
UN 2196
PRTR法
第1種指定化学物質
hs_code
2826199090
risk_code
23/24/25-34
化審法
1-1177
hazard_code
T,C
hazard_note
Toxic/Corrosive
safety_code
26-36/37/39-45
hazard_class
2.3
Hazard Classifications
Acute Tox. 2 InhalationPress. Gas Compr. GasSkin Corr. 1A
ストレージクラス
2A - Gases
有毒物質データの
7783-82-6(Hazardous Substances Data)
危険度評価(NFPA 704基準/消防庁データ)
火災[赤]=0

使用In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.

一般的な説明A toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.

上流・下流製品情報

上流原料

タングステン

下流製品

タングステンカーバイドTungsten carbide

サプライヤー38 社

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