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ジクロロシラン
ジクロロシラン · 二塩化シラン · 二化シラン · dichlorsilane · dichloro-silan · DICHLOROSILANE · dichlorosilicon · Silane,dichloro-
識別子と物理属性
| CAS No. | 4109-96-0 |
|---|---|
| 分子式 | Cl2H2Si |
| 平均分子量 | 101 g/mol |
| 単同位体質量 | 99.93028195 g/mol |
| SMILES | Cl[SiH2]Cl |
| InChIKey | MROCJMGDEKINLD-UHFFFAOYSA-N |
| PubChem CID | 61330 |
| EC No. | 223-888-3 |
| DTXSID | DTXSID1052082 |
| 現地名 | ジクロロシラン |
化学・物理的性質
| 極性表面積 | 0 |
|---|---|
| 水素結合供与体数 | 0 |
| 水素結合受容体数 | 0 |
| 回転可能結合数 | 0 |
| 重原子数 | 3 |
| 形式電荷 | 0 |
| 複雑度 | 2.8 |
| 物質分類 | Toxic Gases & Vapors -> ChlorosilanesFlammable agents - 4th degree |
| SpringerMaterials Properties | 29Si nuclear magnetic resonance spectrum |
| 溶解度 | Solubility in water: reactionreacts with H2O分解する |
| 引火点 | -28 °C c.c.-37°C |
| 沸点 | 8 °C8.3 °C @760 [mm Hg]8.3 °C(lit.) |
| 融点 | -122 °C−122 °C(lit.) |
| 蒸気密度 | Relative vapor density (air = 1): 3.483.5 (vs air) |
| 蒸気圧 | Vapor pressure, kPa at 20 °C: 163.61254 mm Hg ( 20 °C) |
| Physical Description | Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.Gas VaporCBILiquidA flammable and poisonous gas, with a strong repulsive odor[CAMEO] Vapor density = 3.48 (heavier than air)[Burke, p. 101]COLOURLESS GAS WITH CHARACTERISTIC ODOUR. |
| 密度 | 1,22 g/cm3 |
| 外観・状態 | 無色のガス |
| 比重 | 0.76 |
| 色 | colorless gasflammable |
| 臭い | 特徴臭 |
| 爆発限界 | 99% |
| 比熱容量 | Cp(gas): 0.6 J/(g·K), at 25℃ |
| 安定性 | 安定。引火性が非常に高い非常に広い爆発限界に注意。水、アルコール、強酸化剤、アルカリと 激しく反応する。 |
| CAS データベース | 4109-96-0(CAS DataBase Reference) |
| EPAの化学物質情報 | Dichlorosilane (4109-96-0) |
化学的特性
colourless gas
安全性と法規制
| GHS 分類 | DangerH220 (100%): Extremely flammable gas [Danger Flammable gases]P203, P210, P222, P231+P232, P260, P261, P264, P264+P265, P271, P280, P284, P301+P330+P331, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P363, P370+P378, P377, P381, P402+P404, P403, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)Aggregated GHS information provided per 161 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.H220: Extremely flammable gas [Danger Flammable gases] |
|---|---|
| Hazards Identification | Toxic/poison by inhalation (TIH/PIH) |
| 規制情報 | Chemical: Silane, dichloro-Silane, dichloro- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Silane, dichloro- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)Status: Active Update: 28-03-2023 https://echa.europa.eu/registration-dossier/-/registered-dossier/26367The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.) |
| 輸送ラベル（DOT） | Poison Gas Flammable Gas Corrosive |
| 火災危険 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:· Flammablemay be ignited by heat, sparks or flames.Extremely flammable. Gives off irritating or toxic fumes (or gases) in a fire. Gas/air mixtures are explosive. |
| 健康有害性 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:· TOXICmay be fatal if inhaled or absorbed through skin. Some may cause severe skin burns and eye damage. |
| 有害性の概要 | Extremely flammableReacts with water to release HClCorrosive to skin and can produce pneumonitis after inhalation[CSH, p. 168] Corrosive to skin[Quick CPC] A corrosive substance that can cause injury to the skin, eyes, and respiratory tractTear drawingInhalation of high concentrations may cause pulmonary edemaEvaporating liquid can cause frostbite[ICSC] |
| 輸送番号・ガイド（DOT） | 2189 119 |
| 反応性グループ | Chlorosilanes |
| UN 分類 | UN Hazard Class: 2.3UN Subsidiary Risks: 2.1 and 8 |
| Reactivity Alerts | Highly Flammable |
| Reactivity Profile | Chlorosilanes, such as DICHLOROSILANE, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases. |
| Chemical Dangers | The substance may ignite spontaneously on contact with air. Decomposes on heating and on burning. This produces toxic fumes including hydrogen chloride. Reacts with water and moist air. This produces hydrogen chloride. Attacks many metals in the presence of water. |
| 消火 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:Shut off supplyif not possible and no risk to surroundings, let the fire burn itself out. In other cases extinguish with foam, powder. Combat fire from a sheltered position. |
| 応急処置措置 | Fresh air, rest. Half-upright position. Refer for medical attention.Rinse skin with plenty of water or shower. Refer for medical attention .First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention. |
| 漏出応急措置 | · CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area. |
| 応急処置 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:General First Aid: |
| 安全保管 | Fireproof. Keep in a well-ventilated room. |
| 暴露管理・個人防護 | · Wear positive pressure self-contained breathing apparatus (SCBA).TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016]. |
| 非火災時の漏出対応 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]: |
| 漏出処分 | Evacuate danger area! Consult an expert! Personal protection: chemical protection suit including self-contained breathing apparatus. Ventilation. |
| Isolation and Evacuation | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:Immediate precautionary measureSmall spill: |
| Eye Prevention | Wear safety goggles or eye protection in combination with breathing protection. |
| Fire Prevention | NO open flames, NO sparks and NO smoking. Closed system, ventilation, explosion-proof electrical equipment and lighting. |
| Inhalation Risk | A harmful concentration of this gas in the air will be reached very quickly on loss of containment. |
| 有害作用 | Dermatotoxin - Skin burns. |
| 暴露経路 | The substance can be absorbed into the body by inhalation. |
| Signs and Symptoms | Sore throat. Cough. Burning sensation. Shortness of breath. Laboured breathing. Symptoms may be delayed.Pain. Redness. Blisters. Skin burns. Frostbite.Pain. Redness. Severe deep burns. Loss of vision. |
| Toxicity Data | LC50 (rat) = 215 ppm |
| DHS Chemicals of Interest (COI) | Dichlorosilane11000010.4745Flammable chemical that can be released at a facility. |
| F | 4.5 |
| 水環境危害等級（WGK） | 1 |
| TSCA 収載状態 | TSCA listed |
| RTECS 番号 | VV3050000 |
| 輸送番号（UN） | UN 2189 |
| 毒性 | mouse,LC50,inhalation,144ppm/4H (144ppm),Archives of Toxicology. Vol. 70, Pg. 218, 1996. |
| 危険文句（R） | 12-14-23-34 |
| 危険表示 | F+,T |
| 安全措置（S） | 26-36/37/39-45 |
| 危険等級 | 2.3 |
| DOT Classification | 2.3 Hazard Zone B (Gas poisonous by inhalation) |
| 危険度評価（NFPA 704基準/消防庁データ） | 人的[青]=4 火災[赤]=4 反応[黄]=3 |
用途
説明
Dichlorosilane is a highly flammable, corrosive, and toxic gas at room temperature and atmospheric pressure. It causes severe bums on contact with eyes, skin, and mucous membranes. With water or moisture, it hydrolyzes rapidly to yield silica and silicon oxyhydride along with hydrochloric acid. It is shipped as a liquefied gas in low pressure cylinders at its vapor pressure of 9.1 psig (62.7 kPa) at 70°F (21.1℃. It can form flammable mixtures with air and oxidizing agents.
使用
Dichlorosilane is primarily used in the electronics industry for such applications as growth of epitaxial or polycrystalline silicon and chemical vapor deposition of silicon dioxide and silicon nitride.
一般的な説明
Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. Dichlorosilane is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.