化工社化工社 化学情報印刷レポート · 研究参考用
TIN OXIDE (SnO) → Indium oxide tin oxide ZINC oxide
関与物質
| 役割 | 名称 | HCID | 仕込み量 |
|---|---|---|---|
| 反応物 | TIN OXIDE (SnO) | HCID 88989 | — |
| 反応物 | Indium oxide | HCID 150905 | — |
| 反応物 | Zinc Oxide | HCID 3007857 | — |
| 生成物 | Indium oxide tin oxide ZINC oxide | HCID 131731694 | — |
反応手順
Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.
情報源と証拠
| DOI | 10.6084/m9.figshare.5104873.v1 |
|---|---|
| 特許番号 | US09249032B2 |
| 出典データセット | uspto-grants-2016_02 |
| ORD ID | ord-439c4283e71940f89b04c7b2d6d95530 |
| 出典メモ | uspto-grants-2016_02 |