Indium oxide → Indium oxide samarium oxide

HRID 1771006

反応式

HRID 1771006 の反応式
[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[O-2].[Sm+3:7].[O-2].[O-2].[Sm+3]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[O-2:1].[Sm+3:7].[O-2:1].[O-2:1].[Sm+3:7]

参加物

3

反応物 2

HCID 150905Indium oxideHCID 159425Samarium oxide (Sm2O3)

生成物 1

HCID 131731697Indium oxide samarium oxide

実験手順

Except that a spattering target containing indium oxide and samarium oxide (molar ratio of In:Sm=90:10) was used, indium oxide-samarium oxide (ISmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1. [Evaluation of ISmO thin films of Example 1-9 and Comparative 1-9]

出典と根拠

ORDレコード
ord-97421e3459194d7186a29194cf399963
出典データセット
uspto-grants-2016_02
特許番号
US09249032B2

関連ノート

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