Huagongshe화공사 화학 정보 인쇄 보고서 · 연구 참고용
테트라키스(트리메틸실록시)실란
테트라키스(트리메틸실록시)실란 · 테트라키스(트리메틸실록시)실란(TETRAKIS(TRIMETHYLSILOXY)SILANE) · TETRAKIS(TRIMETHYLSILYLOXY)SILANE · Tetrakis(trimethylsilyl) orthosilicate · Tetrakis(trimethylsilyl) silicate · Trisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]- · DK275 · DK751
식별자 및 물리적 특성
| CAS No. | 3555-47-3 |
|---|---|
| 분자식 | C12H36O4Si5 |
| 평균 분자량 | 384.84 g/mol |
| 단동위원소 질량 | 384.1459923 g/mol |
| SMILES | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
| InChIKey | VNRWTCZXQWOWIG-UHFFFAOYSA-N |
| PubChem CID | 19086 |
| EC No. | 222-613-4 |
| DTXSID | DTXSID9042463 |
| 현지명 | 테트라키스(트리메틸실록시)실란 |
화학 및 물리적 성질
| 극성 표면적 | 36.9 |
|---|---|
| 수소 결합 공여자 수 | 0 |
| 수소 결합 수용자 수 | 4 |
| 회전 가능 결합 수 | 8 |
| 무거운 원자 수 | 21 |
| 형식 전하 | 0 |
| 복잡도 | 266 |
| 물질 분류 | Metals -> Metalloid Compounds (Silicon) |
| SpringerMaterials Properties | Boiling point |
| Physical Description | Colorless liquid[Aldrich MSDS] |
| 녹는점 | -60 °C |
| 끓는 점 | 103-106 °C/2 mmHg (lit.) |
| 밀도 | 0.87 g/mL at 25 °C (lit.) |
| 증기압 | 27.4hPa at 20℃ |
| 굴절률 | n20/D 1.389(lit.) |
| 인화점 | 169 °F |
| 저장 조건 | Inert atmosphere,Room Temperature |
| 물리적 상태 | 액체 |
| 비중 | 0.868 |
| 색상 | 무색 내지 거의 무색 |
| 용해도 | 150.7ng/L at 23℃ |
| BRN | 1793898 |
| 헨리 상수 | 2.6×10-8 mol/(m3Pa) at 25℃, Ebert et al. (2023) |
| InChI | 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3 |
| InChIKey | VNRWTCZXQWOWIG-UHFFFAOYSA-N |
| SMILES | C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C |
| LogP(분배 계수) | 9 at 25℃ |
| EPA | Tetrakis(trimethylsiloxy)silane (3555-47-3) |
화학적 성질
Colorless liquid
안전 및 규제
| GHS 분류 | This chemical does not meet GHS hazard criteria for 15.9% (63 of 397) of reports.WarningH315 (51.6%): Causes skin irritation [Warning Skin corrosion/irritation]P261, P264, P264+P265, P271, P273, P280, P302+P352, P304+P340, P305+P351+P338, P319, P321, P332+P317, P337+P317, P362+P364, P403+P233, P405, and P501 (click each P-code to see the statement)Aggregated GHS information provided per 397 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies. |
|---|---|
| 규제 정보 | Chemical: Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-Hazard Traits - BioaccumulationEnvironmental PersistenceREACH registered substance: 1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane (EC: 222-613-4)Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis(trimethylsilyl)oxy-: Does not have an individual approval but may be used as a component in a product covered by a group standard. It is not approved for use as a chemical in its own right. |
| 기타 안전 정보 | IMAP assessments - Trisiloxane, 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-: Human health tier I assessment |
| 유해성 요약 | A skin and strong eye irritant[Aldrich MSDS] See Octamethyltrisiloxane. See Dimethoxydimethylsilane. |
| Hazard Classes and Categories | Skin Irrit. 2 (51.6%) |
| 수질 위해 등급(WGK) | 3 |
| TSCA 등재 상태 | TSCA listed |
| 운송 번호(UN) | NA1993 |
| 관세 코드 | 29319090 |
| 위험 문구(R) | 36/37/38 |
| 위험 표시 | Xi |
| 안전 문구(S) | 26-36 |
| 위험 등급 | CBLEye Irrit. 2Skin Irrit. 2STOT SE 3 |
| 기존화학 물질 | KE-18602 |
| 저장 분류 | 10 - Combustible liquids |
용도
용도
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.