7783-82-6[F][W]([F])([F])([F])([F])[F]NXHILIPIEUBEPD-UHFFFAOYSA-HTungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.
7783-82-6DTXSID80893770Toxic Gases & Vapors -> Corrosive Gases
Corrosives
3.44 g/cu cm
13.069 @25 °C
Yellow liquid or colorless gas
Orthorhombic, deliquescent crystals when solid
Reacts with water
Decomposes in water
Very soluble in carbon tetrachloride, cyclohexane
Solubility in anhydrous hexafluoride: 3.14 moles/1000 g HF
MIscible with many colvents (e.g. cyclohexane, carbon tetrachloride)
67 °F
17.1 °C
17.5 °C @760 [mm Hg]
37 °F
1.9 °C
2.3 °C
Tungsten hexafluoride appears as a toxic corrosive light yellow liquid or gas. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.
CBI; Gas Vapor; Liquid
Colorless gas or light-yellow liquid that decomposes in water; [Hawley]
Critical volume: 233 cu cm/mol
Specific gavity: 3.551 at 15 °C/liquid
Hexane solutions often strongly colored
Tungsten hexafluoride is a toxic, colorless gas or a light yellow liquid.
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Danger
H280 (100%): Contains gas under pressure; may explode if heated [Warning Gases under pressure]
P260, P262, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)
Aggregated GHS information provided per 142 reports by companies from 10 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.
Danger
H280: Contains gas under pressure; may explode if heated [Warning Gases under pressure]
Tungsten fluoride (WF6), (OC-6-11)- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Tungsten fluoride (WF6), (OC-6-11)- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)
REACH registered substance: Tungsten hexafluoride (EC: 232-029-1)
The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.)
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
· Some may burn but none ignite readily.
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
· TOXIC and/or CORROSIVE; may be fatal if inhaled, ingested or absorbed through skin.
Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.
Tungsten hexafluoride
UN2196
Div 2.3 Poisonous gas (49 eCFR § 173.115)
Div 2.3 Poisonous gas (49 eCFR § 173.115)
· CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.
· Do not touch or walk through spilled material.
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
General First Aid:
· Wear positive pressure self-contained breathing apparatus (SCBA).
Biological Exposure Indices (BEI) [ACGIH] - Fluorides in urine = 2 mg/L prior to shift or 3 mg/L at end of shift; (Repeated measurements recommended.)
1.0 [mg/m3], as F, inhalable fraction[German Research Foundation (DFG)]
If material involved in fire: Use dry chemical, dry sand, or carbon dioxide. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.
Environmental considerations: Land spill: Dike surface flow using soil, sand bags, foamed polyurethane, or foamed concrete. Absorb bulk liquid with fly ash, cement powder, or commercial sorbents.
Environmental considerations: Water spill: Use natural deep water pockets excavated lagoons, or sand bag barriers to trap material at bottom. Remove trapped material with suction hoses.
Environmental considerations: Air spill: Vapor knockdown water is corrosive or toxic and should be diked for containment.
If material not involved in fire: Neutralize spilled material with crushed limestone, soda ash, or lime.
SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.
If material not involved in fire: Keep material out of water sources and sewers. Build dikes to contain low as necessary. Use water spray to knock-down vapors. Do not use water on material itself.
Personnel protection: Avoid breathing vapors. Keep upwind. Avoid bodily contact with the material. Do not handle broken packages unless wearing appropriate personal protective equipment. Wash away any material which may have contacted the body with copious amounts of water or soap and water. If contact with the material anticipated, wear appropriate chemical protective clothing.
Excerpt from ERG Guide 125 [Gases - Toxic and/or Corrosive]:
Immediate precautionary measure
Small spill:
Small spill:
3.0 [mg/m3], as W, respirable particulate matter (2.5 mg/m3, as F)
8 hr Time Weighted Avg (TWA): 1 mg/cu m; 15 min Short Term Exposure Limit (STEL): 3 mg/cu m. /Tungsten soluble compounds/
According to the 2006 TSCA Inventory Update Reporting data, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use of tungsten hexafluoride is 1 to 99; the data may be greatly underestimated(1).
Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Fluorine and related compounds/
Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Monitor for shock and treat if necessary ... . Anticipate seizures adn treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patent can swallow, has a strong gag reflex, and does not drool. ... . Cover skin burns with dry sterile dressings after decontamination ... . /Fluorine and related compounds/
Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Positive-pressure ventilation techniques with a bag valve mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Fluorine and related compounds/
Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Choking Agents (Pulmonary/Lung-Damaging Agents)/
For more Antidote and Emergency Treatment (Complete) data for Tungsten hexafluoride (6 total), please visit the HSDB record page.
Section 8(a) of TSCA requires manufacturers of this chemical substance to report preliminary assessment information concerned with production, exposure, and use to EPA as cited in the preamble in 51 FR 41329. Effective date: 1/6/2005; Reporting date: 3/7/2005.
Tungsten hexafluoride
7.1
45
Weapons of Mass Effect chemical material that, if stolen or diverted, can be converted into weapons using simple chemistry, equipment, or techniques.
Used in the application of tungsten coatings; Used in chemical synthesis; [NJ-HSFS]
Its major use is in chemical vapor deposition (CVD), which produces tungsten coatings on both conducting and insulating substrates.
In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.
Fluorinating agent
2023: 1,000,000 - <5,000,000 lb
Production volume for non-confidential chemicals reported under the 2006 Inventory Update Rule. Chemical: Tungsten fluoride. Aggregated National Production Volume: 500,000 to < 1 million lbs.
Manufactured by the direct action of elemental fluorine on solid powdered tungsten, e.g., in a flame reactor.
Prepared by direct fluorination of powdered tungsten. Can be purified by distillation, preferably under pressure.
Computer and Electronic Product Manufacturing
Tungsten fluoride (WF6), (OC-6-11)-: ACTIVE
개요Tungsten(VI) fluoride, also known as tungsten hexafluoride, WF6, is a toxic, corrosive, colorless gas, with a density of about 13 g/L (roughly 11 times heavier than air). It is one of the densest gases known under standard conditions. WF6 is frequently used by the semiconductor industry to form tungsten films, through CVD. The WF6 molecule is octahedral with the symmetry point group of Oh. The W-F bond distances are 183.2 pm. Between 2.3℃ and 17℃, tungsten hexafluoride condenses into a pale-yellow liquid with a density of 3.44 g/cm3 at 15℃. At 2.3℃ it freezes into a white solid with a cubic crystalline structure, with lattice constant of 628 pm and a calculated density of 3.99 g/cm3 . At 29℃ this structure converts to an orthorhombic solid with lattice constants of a = 960.3 pm, b = 871.3 pm, and c = 504.4 pm and a density of 4.56 g/cm3 . In this phase, the W-F distance is 181 pm, and the mean closest intermolecular contacts are 312 pm.
용도In the electronics industry as a source of tungsten metal that connects the aluminum layers within semiconductor devices.
일반 설명A toxic corrosive light yellow liquid or gas. Boiling point 67°F. Melting point 37°F. Noncombustible. Used in the manufacture of other chemicals and in the manufacture of electronics.
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