디클로로실란
디클로로실란 · dichlorsilane · dichloro-silan · DICHLOROSILANE · dichlorosilicon · Silane,dichloro- · DICHLOROSILANE 99 · DICHLOROSILANE 97+%

식별자 및 물리적 특성
| CAS No. | 4109-96-0 |
|---|---|
| 분자식 | Cl2H2Si |
| 평균 분자량 | 101 g/mol |
| 단동위원소 질량 | 99.93028195 g/mol |
| SMILES | Cl[SiH2]Cl |
| InChIKey | MROCJMGDEKINLD-UHFFFAOYSA-N |
| PubChem CID | 61330 |
| EC No. | 223-888-3 |
| DTXSID | DTXSID1052082 |
| 현지명 | 디클로로실란 |
화학 및 물리적 성질
| 극성 표면적 | 0 |
|---|---|
| 수소 결합 공여자 수 | 0 |
| 수소 결합 수용자 수 | 0 |
| 회전 가능 결합 수 | 0 |
| 무거운 원자 수 | 3 |
| 형식 전하 | 0 |
| 복잡도 | 2.8 |
| 물질 분류 | Toxic Gases & Vapors -> ChlorosilanesFlammable agents - 4th degree |
| SpringerMaterials Properties | 29Si nuclear magnetic resonance spectrum |
| 용해도 | Solubility in water: reactionreacts with H2O |
| 인화점 | -28 °C c.c.-37°C |
| 끓는 점 | 8 °C8.3 °C @760 [mm Hg]8.3 °C(lit.) |
| 녹는점 | -122 °C−122 °C(lit.) |
| 증기 밀도 | Relative vapor density (air = 1): 3.483.5 (vs air) |
| 증기압 | Vapor pressure, kPa at 20 °C: 163.61254 mm Hg ( 20 °C) |
| Physical Description | Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.Gas VaporCBILiquidA flammable and poisonous gas, with a strong repulsive odor[CAMEO] Vapor density = 3.48 (heavier than air)[Burke, p. 101]COLOURLESS GAS WITH CHARACTERISTIC ODOUR. |
| 밀도 | 1,22 g/cm3 |
| 물리적 상태 | 무색 가스 |
| 비중 | 0.76 |
| 색상 | colorless gasflammable |
| 냄새 | Characteristic odor |
| 폭발한계 | 99% |
| 용해도 | 물에서 분해되다 |
| 비열 | Cp(gas): 0.6 J/(g·K), at 25℃ |
| 안정성 | 안정적인. 가연성이 매우 높습니다. 폭발 한계가 매우 넓다는 점에 유의하십시오. 물, 알코올, 강산화제, 염기와 격렬하게 반응함. |
| EPA | Dichlorosilane (4109-96-0) |
화학적 성질
colourless gas
안전 및 규제
| GHS 분류 | DangerH220 (100%): Extremely flammable gas [Danger Flammable gases]P203, P210, P222, P231+P232, P260, P261, P264, P264+P265, P271, P280, P284, P301+P330+P331, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P363, P370+P378, P377, P381, P402+P404, P403, P403+P233, P405, P410+P403, and P501 (click each P-code to see the statement)Aggregated GHS information provided per 161 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.H220: Extremely flammable gas [Danger Flammable gases] |
|---|---|
| Hazards Identification | Toxic/poison by inhalation (TIH/PIH) |
| 규제 정보 | Chemical: Silane, dichloro-Silane, dichloro- is listed on the EPA's Chemical Data Reporting (CDR) system. Manufacturers and importers of Silane, dichloro- are required to report information about their production and use of this chemical to the EPA under the Toxic Substances Control Act (TSCA). (40 eCFR Part 711)Status: Active Update: 28-03-2023 https://echa.europa.eu/registration-dossier/-/registered-dossier/26367The New Jersey Worker and Community Right to Know Act requires public and private employers to provide information about hazardous substances at their workplaces. (N.J.S.A. 34:5A-1 et. seq.) |
| 운송 라벨(DOT) | Poison Gas Flammable Gas Corrosive |
| 화재 위험 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:· Flammablemay be ignited by heat, sparks or flames.Extremely flammable. Gives off irritating or toxic fumes (or gases) in a fire. Gas/air mixtures are explosive. |
| 건강 유해성 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:· TOXICmay be fatal if inhaled or absorbed through skin. Some may cause severe skin burns and eye damage. |
| 유해성 요약 | Extremely flammableReacts with water to release HClCorrosive to skin and can produce pneumonitis after inhalation[CSH, p. 168] Corrosive to skin[Quick CPC] A corrosive substance that can cause injury to the skin, eyes, and respiratory tractTear drawingInhalation of high concentrations may cause pulmonary edemaEvaporating liquid can cause frostbite[ICSC] |
| 운송 번호 및 가이드(DOT) | 2189 119 |
| 반응성 그룹 | Chlorosilanes |
| UN 분류 | UN Hazard Class: 2.3UN Subsidiary Risks: 2.1 and 8 |
| Reactivity Alerts | Highly Flammable |
| Reactivity Profile | Chlorosilanes, such as DICHLOROSILANE, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases. |
| Chemical Dangers | The substance may ignite spontaneously on contact with air. Decomposes on heating and on burning. This produces toxic fumes including hydrogen chloride. Reacts with water and moist air. This produces hydrogen chloride. Attacks many metals in the presence of water. |
| 소화 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:Shut off supplyif not possible and no risk to surroundings, let the fire burn itself out. In other cases extinguish with foam, powder. Combat fire from a sheltered position. |
| 응급 조치 | Fresh air, rest. Half-upright position. Refer for medical attention.Rinse skin with plenty of water or shower. Refer for medical attention .First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention. |
| 누출 비상 조치 | · CALL 911. Then call emergency response telephone number on shipping paper. If shipping paper not available or no answer, refer to appropriate telephone number listed on the inside back cover.· ELIMINATE all ignition sources (no smoking, flares, sparks or flames) from immediate area. |
| 응급 처치 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:General First Aid: |
| 안전 보관 | Fireproof. Keep in a well-ventilated room. |
| 노출 관리 및 개인 보호 | · Wear positive pressure self-contained breathing apparatus (SCBA).TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016]. |
| 비화재 누출 대응 | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]: |
| 누출 처리 | Evacuate danger area! Consult an expert! Personal protection: chemical protection suit including self-contained breathing apparatus. Ventilation. |
| Isolation and Evacuation | Excerpt from ERG Guide 119 [Gases - Toxic - Flammable]:Immediate precautionary measureSmall spill: |
| Eye Prevention | Wear safety goggles or eye protection in combination with breathing protection. |
| Fire Prevention | NO open flames, NO sparks and NO smoking. Closed system, ventilation, explosion-proof electrical equipment and lighting. |
| Inhalation Risk | A harmful concentration of this gas in the air will be reached very quickly on loss of containment. |
| 유해 작용 | Dermatotoxin - Skin burns. |
| 노출 경로 | The substance can be absorbed into the body by inhalation. |
| Signs and Symptoms | Sore throat. Cough. Burning sensation. Shortness of breath. Laboured breathing. Symptoms may be delayed.Pain. Redness. Blisters. Skin burns. Frostbite.Pain. Redness. Severe deep burns. Loss of vision. |
| Toxicity Data | LC50 (rat) = 215 ppm |
| DHS Chemicals of Interest (COI) | Dichlorosilane11000010.4745Flammable chemical that can be released at a facility. |
| 수질 위해 등급(WGK) | 1 |
| TSCA 등재 상태 | TSCA listed |
| RTECS 번호 | VV3050000 |
| 운송 번호(UN) | UN 2189 |
| 독성 | mouse,LC50,inhalation,144ppm/4H (144ppm),Archives of Toxicology. Vol. 70, Pg. 218, 1996. |
| 위험 문구(R) | 12-14-23-34 |
| 위험 표시 | F+,T |
| 안전 문구(S) | 26-36/37/39-45 |
| 위험 등급 | 2.3 |
| 기존화학 물질 | KE-10209 |
| DOT ClassificationII | 2.3 Hazard Zone B (Gas poisonous by inhalation) |
| F 고인화성물질 | 4.5 |
| 사고대비 물질 필터링 | 89 |
용도
개요
Dichlorosilane is a highly flammable, corrosive, and toxic gas at room temperature and atmospheric pressure. It causes severe bums on contact with eyes, skin, and mucous membranes. With water or moisture, it hydrolyzes rapidly to yield silica and silicon oxyhydride along with hydrochloric acid. It is shipped as a liquefied gas in low pressure cylinders at its vapor pressure of 9.1 psig (62.7 kPa) at 70°F (21.1℃. It can form flammable mixtures with air and oxidizing agents.
용도
Dichlorosilane is primarily used in the electronics industry for such applications as growth of epitaxial or polycrystalline silicon and chemical vapor deposition of silicon dioxide and silicon nitride.
일반 설명
Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. Dichlorosilane is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.