반응식
[C:1]([O:6][C:7]1([CH2:12][CH3:13])[CH2:11][CH2:10][CH2:9][CH2:8]1)(=[O:5])[C:2]([CH3:4])=[CH2:3].[C:14]([O:19][CH:20]1[CH:27]2[CH2:28][CH:23]3[CH2:24][CH:25]([CH2:29][C:21]1([CH:30]([CH3:32])[CH3:31])[CH2:22]3)[CH2:26]2)(=[O:18])[C:15]([CH3:17])=[CH2:16].C(OC1CCOC1=O)(=O)C(C)=C.[C:45]([O:50][C:51]12[CH2:60][CH:55]3[CH2:56][CH:57]([CH2:59][C:53]([OH:61])([CH2:54]3)[CH2:52]1)[CH2:58]2)(=[O:49])[C:46]([CH3:48])=[CH2:47]>O1CCCC1>[C:14]([O:19][CH:20]1[CH:27]2[CH2:26][CH:25]3[CH2:24][CH:23]([CH2:22][C:21]1([CH:30]([CH3:32])[CH3:31])[CH2:29]3)[CH2:28]2)(=[O:18])[C:15]([CH3:17])=[CH2:16].[C:1]([O:6][C:7]1([CH2:12][CH3:13])[CH2:11][CH2:10][CH2:9][CH2:8]1)(=[O:5])[C:2]([CH3:4])=[CH2:3].[C:45]([O:50][C:51]12[CH2:58][CH:57]3[CH2:56][CH:55]([CH2:54][C:53]([OH:61])([CH2:59]3)[CH2:52]1)[CH2:60]2)(=[O:49])[C:46]([CH3:48])=[CH2:47]참가 물질
반응물 4
생성물 2
시약·촉매·용매 1
실험 절차
A solution of 1-ethylcyclopentyl methacrylate (ECPMA, M1; 20 mmol), 1-isopropyl-adamantanyl methacrylate (IAM, M2; 20 mmol), 2-oxo-tetrahydro-furan-3-yl methacrylate (α-GBLMA, M3; 30 mmol), 3-oxo-4,10-dioxa-tricyclo[5.2.1.02,6]dec-8(or 9)-yl methacrylate (ODOTMA, M4; 20 mmol), and 3-hydroxy-adamantanyl methacrylate (HAMA, M5; 10 mmol) dissolved in 30 g of tetrahydrofuran (THF) is degassed by bubbling with nitrogen and charged to a 500 ml flask equipped with a condenser, nitrogen inlet and mechanical stirrer along with an additional 10 g of degassed THF. The solution is brought to reflux, and 6 g of dimethyl-2,2-azodiisobutyrate is dissolved in 5 g of THF and charged in to the flask. The polymerization mixture is then stirred for about 4 hours at reflux, after which time the reaction is diluted with 5 g of THF and the polymerization mixture cooled to room temperature. The polymer is precipitated by addition to 1.0 L of isopropanol, collected by filtration, re-precipitated by dissolving in 50 g THF and addition to another 1.0 L isopropanol, and collected and dried under vacuum at 45° C. for 48 h. to yield photoresist polymer poly(IAM/ECPMA/α-GBLMA/ODOTMA/HAMA). Mw=8,000.
후처리
- customis degassed
- customby bubbling with nitrogen
- additioncharged to a 500 ml flask
- customequipped with a condenser, nitrogen inlet and mechanical stirrer along with an additional 10 g of degassed THF
- temperatureto reflux
- dissolution6 g of dimethyl-2,2-azodiisobutyrate is dissolved in 5 g of THF
- additioncharged in to the flask
- temperatureat reflux
- additionafter which time the reaction is diluted with 5 g of THF
- customThe polymer is precipitated by addition to 1.0 L of isopropanol
- filtrationcollected by filtration
- customre-precipitated
- dissolutionby dissolving in 50 g THF
- additionaddition to another 1.0 L isopropanol
- customcollected
- customdried under vacuum at 45° C. for 48 h.
출처 및 근거
- ORD 기록
- ord-29b6e77703b8416d8d580ae33fb2b39d
- 출처 데이터셋
- uspto-grants-2014_12
- 특허 번호
- US08900794B2
연결된 노트
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