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HuagongsheHuagongshe Chemistry Print Report · For research reference only
HRID 1033876Generated: October 30, 2026

Hexamethyldisilazane → 1,1,1-Trichloro-N-(trimethylsilyl)silanamine

https://huagongshe.com/reaction/1033876

Reaction equation

Participants

RoleNameHCIDCharge
ReactantHexamethyldisilazaneHCID 13838—
ReactantSilicon tetrachlorideHCID 24816—
Product1,1,1-Trichloro-N-(trimethylsilyl)silanamineHCID 1254001592%

Reaction Steps

70 g of silicon tetrachloride (0.41 mol) and 12.5 g of hexamethyldisilazane (0.08 mol) were brought together in a 250 ml three-necked flask and stirred at room temperature for 20 hours. Subsequent fractional distillation in a short Vigreux column yielded 16.2 g (92%) of 1,1,1-trichloro-3,3,3-trimethyldisilazane as a colourless liquid.

Provenance & Evidence

DOI10.6084/m9.figshare.5104873.v1
Patent numberUS05312942
Source datasetuspto-grants-1994_05
ORD IDord-5fa3c54717f5474b94e9dd1303459fbb
Source noteuspto-grants-1994_05