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Into a 500 ml glass reactor equipped with a reflux condenser and a stirrer, a 100 g (0.413 mol) of a mixture (1:1) of the 3,4,5,6-tetrafluorophthaloyldifluoride and the 3,3,4,5,6,7-hexafluoro-1-[3H]-isobenzofuranone of Example 2, and 43.8 g (0.413 mol) of sodium carbonate were charged, and the mixture was reacted at 130° C. for 5 hours with vigorous stirring. Then, the reaction mixture was subjected to distillation to obtain 75.6 g of tetrafluorophthalic anhydride. The yield was 83.2%.

1. customInto a 500 ml glass reactor equipped with a reflux condenser and a stirrer
2. customthe mixture was reacted at 130° C. for 5 hours with vigorous stirring
3. distillationThen, the reaction mixture was subjected to distillation