2-Heptanone → HCID 86603852, compound

Participants

Reaction Conditions

Reaction Steps

0.0126 g tetramethylammonium acetate (Aldrich Chemical Company, Milwaukee, Wis. 53201), were added to 1.247 g ethyl acetoacetate, the mix was stirred until dissolution, then 44.24 g of 2-heptanone (Ultra Pure Solutions Inc., Castroville, Calif. 85012), and 4.49 g of dimethyldiacetoxysilane (Gelest, Tullytone, Pa. 19007) were added in a 60 ml particle free high density polyethylene bottle. The solution was mixed vigorously for one minute. After mixing, the diluted precursor was hand filtered to 0.1 μm using a teflon filter. Approximately 2.0-3.0 ml of The formulation was deposited onto an 8″ etched (C4F8; 20 s.) & ashed (plasma O2; 20 s.) carbon depleted porous SiCOH film (˜4000 Å thick NANOGLASS-E®). After deposition, the wafer was spun at 2500 rpm for 30 seconds to form a film. The films were heated at elevated temperatures for 1 min. each at 125° C., 200° C. and 350° C. in N2. The following results were observed:

Provenance & Evidence