HuagongsheHuagongshe Chemistry Print Report · For research reference only
Ammonia → Indene
Participants
| Role | Name | HCID | Charge |
|---|---|---|---|
| Reactant | Ammonia | HCID 222 | — |
| Reactant | 1H-indene-1-carboxylic acid | HCID 185912 | — |
| Product | Indene | HCID 7219 | — |
Reaction Steps
Subsequently, as shown in FIG. 3C, the substrate 1 coated with photoresist 102 is put in heat-treatment furnace 105. In the furnace 105, the substrate 1 is heated in an ammonia gas atmosphere 106. The heat treatment is performed at a temperature of 95° to 120° C. for 75 minutes. At the photo-sensitized region, the indene carboxylic acid is crosslinked and alkali-insoluble indene is produced.
Provenance & Evidence
| DOI | 10.6084/m9.figshare.5104873.v1 |
|---|---|
| Patent number | US05127989 |
| Source dataset | uspto-grants-1992_07 |
| ORD ID | ord-1b9a6ccae9c54cee81d3c839005bba5f |
| Source note | uspto-grants-1992_07 |