反应详情

In tetrahydrofuran or toluene, dissolved were maleic anhydride (1 mol), tert-butyl 5-norbornene-2-carboxylate (0.5-0.9 mol) prepared according to Preparation Example I, 2-hydroxyethyl 5-norbornene-2-carboxylate (0.05-0.8 mol) prepared according to Example II, and mono-methyl cis-5-norbornene-endo-2, 3-dicarboxylate (0.01-0.5 mol) prepared according to Preparation Example VI. then, 2,2′-azobisisobutyronitrile (AIBN) (0.5-10 g), as a polymerization initiator, was added thereto, and the reaction was performed at a temperature between 65° C. and 70° C. under nitrogen or argon atmosphere for 4-24 hours. Crude product thus obtained was precipitated from ethyl ether or hexane, and the precipitate was dried to give the title copolymer resin (Formula IV) having a molecular weight of 3,000-100,000 (yield: 63%). The copolymer resin thus prepared has high transparency to ArF light, increased etching resistance and excellent adhesiveness, and is developable by 2.38 wt % aqueous TMAH solution.

1. customprepared
2. customprepared
3. customprepared
4. customaccording to Preparation Example VI
5. customwas performed at a temperature between 65° C. and 70° C. under nitrogen
6. customCrude product thus obtained
7. customwas precipitated from ethyl ether or hexane
8. customthe precipitate was dried