TIN OXIDE (SnO) → Indium oxide tin oxide ZINC oxide

HRID 1628358

Reaktionsgleichung

[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[Sn:6]=O.[O-2].[Zn+2:9]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[Sn:6]=[O:1].[O-2:1].[Zn+2:9]

Komponenten

Edukt 3

HCID 88989TIN OXIDE (SnO)

HCID 150905Indium oxide

HCID 3007857Zinc Oxide

Produkt 1

HCID 131731694Indium oxide tin oxide ZINC oxide

Versuchsvorschrift

Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.

Quellen und Nachweise

ORD-Eintrag: ord-9f62a2d2a543487ba361e59471e21403
Quelldatensatz: uspto-grants-2014_07
DOI: 10.6084/m9.figshare.5104873.v1
Patentnummer: US08785920B2

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