[O-2:1].[Zn+2:2].[Sn:3]=O.[O-2].[Yb+3:6].[O-2].[O-2].[Yb+3]>>[O-2:1].[Zn+2:2].[Sn:3]=[O:1].[O-2:1].[Yb+3:6].[O-2:1].[O-2:1].[Yb+3:6]Except that a target containing zinc oxide, tin oxide and ytterbium oxide (molar ratio of Zn:Sn:Yb=20:76:4) was used, zinc oxide-tin oxide-ytterbium oxide (ZTYbO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.
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