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Basic information
- CAS
3555-47-3- Standard SMILES
C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C- InChIKey
VNRWTCZXQWOWIG-UHFFFAOYSA-N- Molecular formula
- C12H36O4Si5
- Average molar mass
- 384.846 g/mol
- Monoisotopic mass
- 384.14599228
Names & identifiers
- Preferred name
- Tetrakis(trimethylsiloxy)silane
- IUPAC
- Tetrakis(trimethylsilyl) orthosilicate
- English name
- Tetrakis(trimethylsiloxy)silane
- Molecular formula
- C12H36O4Si5
- Molecular weight
- 384.84
Names & synonyms
TETRAKIS(TRIMETHYLSILYLOXY)SILANETetrakis(trimethylsilyl) orthosilicateTetrakis(trimethylsilyl) silicateTrisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-DK275DK751loxy)DKFELEX0194Tetrakis(trimethylsietrakis(trimethylsilyl)silicate
Database identifiers
- CAS
3555-47-3- PubChem CID
- 19086
- DTXSID
DTXSID9042463- UNII
- 55L9T9A11I
- EC Number
- 222-613-4
- Nikkaji
- J129.389C
Properties
Physicochemical properties
- Melting point
- -60 °C · -60 °C
- Boiling point
- 103 · 103-106 °C/2 mmHg (lit.)
- Density
- 0.87 g/mL · 0.87 g/mL at 25 °C (lit.)
- vapor pressure
- 27.4 hPa · 27.4hPa at 20℃
- refractive index
- 20 · n20/D 1.389(lit.)
- Flash point
- 169 °F · 169 °F
- storage temp.
- Inert atmosphere,Room Temperature
- form
- liquid
- Specific Gravity
- 0.868 · 0.868
- color
- Colorless to Almost colorless
- Water Solubility
- 150.7 ng/L · 150.7ng/L at 23℃
- Hydrolytic Sensitivity
- 4 · 4: no reaction with water under neutral conditions
- BRN
- 1793898 · 1793898
- Henry's Law Constant
- 2.6 · 2.6×10-8 mol/(m3Pa) at 25℃, Ebert et al. (2023)
- InChI
- 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3
- InChIKey
- VNRWTCZXQWOWIG-UHFFFAOYSA-N
- SMILES
- C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C
- LogP
- 9 at · 9 at 25℃
- FDA UNII
- 55 L9T9A11I · 55L9T9A11I
- EPA Substance Registry System
- Tetrakis(trimethylsiloxy)silane (3555-47-3)
- UNSPSC Code
- 12352103 · 12352103
- NACRES
- 22 · NA.22
- Symbol(GHS)
Safety & regulation
Safety information is for reference only and does not replace the supplier’s Safety Data Sheet (SDS), applicable regulations, or professional assessment.
Safety data
- PPE
- Eyeshields, Gloves, type ABEK (EN14387) respirator filter
- wgk
- 3
- tsca
- TSCA listed
- ridadr
- NA1993
- hs_code
- 29319090
- risk_code
- 36/37/38
- Signal word
- Warning
- Symbol(GHS)
- GHS07
- hazard_code
- Xi
- safety_code
- 26-36
- hazard_class
- CBL
- Storage Class
- 10 - Combustible liquids
- target organs
- Respiratory system
- Hazard statements
- H315-H319-H335
- Excepted Quantities
- Non-Hazardous
- REACH Registrations
- Active
- Hazard Classifications
- Eye Irrit. 2Skin Irrit. 2STOT SE 3
- Precautionary statements
- P261-P264-P271-P280-P302+P352-P305+P351+P338
Chemistry & industry
Applications
UsesTetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.
Upstream & downstream products
Upstream raw materials
Related reactions
0 records
No reaction records under the current filter.
Compound notes
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