Basic information
- CAS
1009-93-4- Standard SMILES
C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1- InChIKey
WGGNJZRNHUJNEM-UHFFFAOYSA-N- Molecular formula
- C6H21N3Si3
- Average molar mass
- 219.51 g/mol
- Monoisotopic mass
- 219.10432729
Names & identifiers
- Preferred name
- 2,2,4,4,6,6-Hexamethylcyclotrisilazane
- IUPAC
- 2,2,4,4,6,6-hexamethyl-1,3,5,2,4,6-triazatrisilinane
- English name
- 2,2,4,4,6,6-Hexamethylcyclotrisilazane
- Molecular formula
- C6H21N3Si3
- Molecular weight
- 219.51
Names & synonyms
Show more names
Database identifiers
- CAS
1009-93-4- PubChem CID
- 66094
- DTXSID
DTXSID4037748- ChEMBL
CHEMBL3183025- UNII
- ECL2W6GI8L
- EC Number
- 213-773-6
- Nikkaji
- J26.484I
Properties
Computed structural properties
- Topological polar surface area
- 36.1 Ų
- Hydrogen bond donors
- 3
- Hydrogen bond acceptors
- 3
- Rotatable bonds
- 0
- Heavy atoms
- 12
- Formal charge
- 0
- Complexity
- 139
Physicochemical properties
- Melting point
- 10 °C · −10 °C(lit.)
- Boiling point
- 188 °C756 · 188 °C756 mm Hg(lit.)
- Density
- 0.92 g/mL · 0.92 g/mL at 25 °C(lit.)
- vapor pressure
- 35 Pa · 35Pa at 25℃
- refractive index
- 20 · n20/D 1.445(lit.)
- Flash point
- 139 °F · 139 °F
- storage temp.
- 2 · 2-8°C, protect from light
- Water Solubility
- Decomposes in contact with water,Insoluble in water
- pka
- 14.76 · 14.76±0.20(Predicted)
- form
- liquid
- color
- colorless
- Specific Gravity
- 0.922 · 0.922
- Hydrolytic Sensitivity
- 7 · 7: reacts slowly with moisture/water
- BRN
- 774739 · 774739
- InChI
- 1S/C6H21N3Si3/c1-10(2)7-11(3,4)9-12(5,6)8-10/h7-9H,1-6H3
- InChIKey
- WGGNJZRNHUJNEM-UHFFFAOYSA-N
- SMILES
- C[Si]1(C)N[Si](C)(C)N[Si](C)(C)N1
- CAS DataBase Reference
- 1009 · 1009-93-4(CAS DataBase Reference)
- EWG's Food Scores
- 1 · 1
- FDA UNII
- 2 W6GI8L · ECL2W6GI8L
- NIST Chemistry Reference
- Hexamethylcyclotrisilazane(1009-93-4)
- EPA Substance Registry System
- 2 · Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl- (1009-93-4)
- UNSPSC Code
- 12352103 · 12352103
- NACRES
- 22 · NA.22
- Symbol(GHS)
- 2 · GHS02,GHS07,GHS02,GHS07
- Signal word
- Warning
- Hazard statements
- 226 · H226-H302-H315-H319-H335
- Precautionary statements
- 210 · P210-P233-P240-P301+P312+P330-P302+P352-P305+P351+P338-P301+P312-P303+P361+P353
- target organs
- Respiratory system
- PPE
- Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter
- Hazard Codes
- Xi
- Risk Statements
- 36 · 36/37/38
- Safety Statements
- 26 · 26-36
- RIDADR
- 1993 · 1993
- WGK Germany
- 3 · 3
- RTECS
- 4720000 · GZ4720000
- F
- 10 · 10-21
- TSCA
- TSCA listed
- HazardClass
- 3.2 · 3.2
- PackingGroup
- III
- HS Code
- 29349990 · 29349990
- Storage Class
- 3 · 3 - Flammable liquids
- Hazard Classifications
- 4 OralEye · Acute Tox. 4 OralEye Irrit. 2Flam. Liq. 3Skin Irrit. 2STOT SE 3
- REACH Registrations
- Active
Safety & regulation
GHS classification
GHS Classification
This chemical does not meet GHS hazard criteria for 5.7% (4 of 70) of reports.
Warning
H226 (92.9%): Flammable liquid and vapor [Warning Flammable liquids];H302 (94.3%): Harmful if swallowed [Warning Acute toxicity, oral];H315 (55.7%): Causes skin irritation [Warning Skin corrosion/irritation];H319 (55.7%): Causes serious eye irritation [Warning Serious eye damage/eye irritation];H335 (61.4%): May cause respiratory irritation [Warning Specific target organ toxicity, single exposure; Respiratory tract irritation]
P210, P233, P240, P241, P242, P243, P261, P264, P264+P265, P270, P271, P280, P301+P317, P302+P352, P303+P361+P353, P304+P340, P305+P351+P338, P319, P321, P330, P332+P317, P337+P317, P362+P364, P370+P378, P403+P233, P403+P235, P405, and P501 (click each P-code to see the statement)
Aggregated GHS information provided per 70 reports by companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.;Reported as not meeting GHS hazard criteria per 4 of 70 reports by companies.;There are 5 notifications provided by 66 of 70 reports by companies with hazard statement code(s).;Information may vary between notifications depending on impurities, additives, and other factors. The percentage value in parenthesis indicates the notified classification ratio from companies that provide hazard codes. Only hazard codes with percentage values above 10% are shown. For more detailed information, please visit ECHA C&L website.
Hazard information
Regulatory Information
Chemical: Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl-
Status: Active Update: 26-04-2023 https://echa.europa.eu/registration-dossier/-/registered-dossier/19361
Regulatory information
Regulatory Information
Chemical: Cyclotrisilazane, 2,2,4,4,6,6-hexamethyl-
Status: Active Update: 26-04-2023 https://echa.europa.eu/registration-dossier/-/registered-dossier/19361
Safety data
- F
- 10-21
- PPE
- Eyeshields, Faceshields, Gloves, type ABEK (EN14387) respirator filter
- wgk
- 3
- tsca
- TSCA listed
- rtecs
- GZ4720000
- ridadr
- 1993
- hs_code
- 29349990
- risk_code
- 36/37/38
- Signal word
- Warning
- Symbol(GHS)
- GHS02,GHS07,GHS02,GHS07
- hazard_code
- Xi
- safety_code
- 26-36
- hazard_class
- 3.2
- Storage Class
- 3 - Flammable liquids
- packing_group
- III
- target organs
- Respiratory system
- Hazard statements
- H226-H302-H315-H319-H335
- REACH Registrations
- Active
- Hazard Classifications
- Acute Tox. 4 OralEye Irrit. 2Flam. Liq. 3Skin Irrit. 2STOT SE 3
- Precautionary statements
- P210-P233-P240-P301+P312+P330-P302+P352-P305+P351+P338-P301+P312-P303+P361+P353
Chemistry & industry
Uses & manufacturing
Applications
Description2,2,4,4,6,6-Hexamethylcyclotrisilazane is a colorless liquid that is soluble in water. It has an odor similar to ether and a boiling point of about 100 degrees Celsius. The chemical formula for this compound is CH3(CH2)6SiCl6. 2,2,4,4,6,6-Hexamethylcyclotrisilazane has been used as a solvent for producing polymers and as a reagent for organic synthesis. It may also be used as a precursor to silicon dioxide nanoparticles used in producing semiconductors and solar cells. 2,2,4,4,6,6-Hexamethylcyclotrisilazane reacts with hydrochloric acid to produce hydrogen chloride gas and zirconium oxide. It also reacts with sodium citrate in the presence of fatty acids to form an ester product called methyl eth.
Uses2,2,4,4,6,6-Hexamethylcyclotrisilazane has been extensively studied as a precursor for silicon nitride and silicon carbonitride deposition and can also be used as an additive in photoresists. As one of the common silazanes, it is also a good monomer for synthesizing polymers. It readily undergoes ring-opening and copolymerizes with various monomers in the presence of hydroxyl groups, and has wide applications in the synthetic rubber and engineering plastics industries.
Preparation methods
Preparation2,2,4,4,6,6-Hexamethylcyclotrisilazane was first synthesized in 1948 by Brewer and Haber via the reaction of dimethyldichlorosilane Si(CH3)2Cl2 with liquid ammonia NH3, followed by extraction and precipitation with benzene.
Upstream & downstream products
Upstream raw materials
Downstream products
Suppliers100 total
Related reactions
Compound notes
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