TIN OXIDE (SnO) → Indium oxide tin oxide ZINC oxide

HRID 1628358

Reaction equation

[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[Sn:6]=O.[O-2].[Zn+2:9]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[Sn:6]=[O:1].[O-2:1].[Zn+2:9]

Participants

Reactant 3

HCID 88989TIN OXIDE (SnO)

HCID 150905Indium oxide

HCID 3007857Zinc Oxide

Product 1

HCID 131731694Indium oxide tin oxide ZINC oxide

Procedure

Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.

Sources & evidence

ORD record: ord-9f62a2d2a543487ba361e59471e21403
Source dataset: uspto-grants-2014_07
DOI: 10.6084/m9.figshare.5104873.v1
Patent number: US08785920B2

Linked notes

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