TIN OXIDE (SnO) → Indium oxide tin oxide samarium oxide
Reaction equation
[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[Sn:6]=O.[O-2].[Sm+3:9].[O-2].[O-2].[Sm+3]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[Sn:6]=[O:1].[O-2:1].[Sm+3:9].[O-2:1].[O-2:1].[Sm+3:9]Participants
4
Procedure
Except that a target containing indium oxide, tin oxide and samarium oxide (molar ratio of In:Sn:Sm=60:35:5) was used, indium oxide-tin oxide-samarium oxide (ITSmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.
Sources & evidence
- ORD record
- ord-af2deb8a4e7543958bd9c0e0bbbb1d19
- Source dataset
- uspto-grants-2016_02
- Patent number
- US09249032B2
Reaction notes
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