Reaction equation
[S:1](=[O:4])(=[O:3])=[O:2].[S:5](=[O:9])(=[O:8])([OH:7])[OH:6]>>[OH:8][S:5]([OH:9])(=[O:7])=[O:6].[O:2]=[S:1](=[O:4])=[O:3]Participants
Procedure
FIG. 7 depicts a subunit for sulfuric acid. Liquid sulfur dioxide is supplied by a cylinder 121 to a fractionating column 122 and then to a membrane filter 123. The purified sulfur dioxide gas is then fed to a catalytic oxidizer 124 where it is combined with purified air 125 over a platinum or other suitable catalyst to produce sulfur trioxide 126. The sulfur trioxide is combined with purified sulfuric acid 127 in an absorber 128 to form ultra-pure oleum 129, which is subsequently diluted with ultra-pure water 130 in a diluting vessel 131. An electrolysis cell 132 then converts this diluted oleum to a mixture of sulfuric and persulfuric acids 133. recycling some of the sulfuric acid back to the absorber 128. As in the other subunits, the product mixture is ready for application directly to the point of use on the fabrication line.
Sources & evidence
- ORD record
- ord-e7162987fc5047f0bed022391e7a5186
- Source dataset
- uspto-grants-1993_09
- Patent number
- US05242468
Linked notes
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