Ammonia → Indene
Reaction equation
N.[CH:2]1(C(O)=O)[C:10]2[C:5](=[CH:6][CH:7]=[CH:8][CH:9]=2)[CH:4]=[CH:3]1>>[CH2:2]1[C:10]2[C:5](=[CH:6][CH:7]=[CH:8][CH:9]=2)[CH:4]=[CH:3]1Participants
3
Reactant 2
Product 1
Procedure
Subsequently, as shown in FIG. 3C, the substrate 1 coated with photoresist 102 is put in heat-treatment furnace 105. In the furnace 105, the substrate 1 is heated in an ammonia gas atmosphere 106. The heat treatment is performed at a temperature of 95° to 120° C. for 75 minutes. At the photo-sensitized region, the indene carboxylic acid is crosslinked and alkali-insoluble indene is produced.
Sources & evidence
- ORD record
- ord-1b9a6ccae9c54cee81d3c839005bba5f
- Source dataset
- uspto-grants-1992_07
- Patent number
- US05127989
Reaction notes
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