反応式
[CH:1]1[C:6]([C:7]2[CH:12]=[CH:11][C:10]3[C:13]([O:15][C:16](=[O:17])[C:9]=3[CH:8]=2)=[O:14])=[CH:5][C:4]2[C:18]([O:20][C:21](=[O:22])[C:3]=2[CH:2]=1)=[O:19].[CH:23]1[C:28]([NH2:29])=[CH:27][C:26]([C:30]([F:33])([F:32])[F:31])=[C:25]([C:34]2[CH:39]=[CH:38][C:37]([NH2:40])=[CH:36][C:35]=2[C:41]([F:44])([F:43])[F:42])[CH:24]=1>CN1C(=O)CCC1>[CH:1]1[C:6]([C:7]2[CH:12]=[CH:11][C:10]3[C:13]([O:15][C:16](=[O:17])[C:9]=3[CH:8]=2)=[O:14])=[CH:5][C:4]2[C:18]([O:20][C:21](=[O:22])[C:3]=2[CH:2]=1)=[O:19].[CH:38]1[C:37]([NH2:40])=[CH:36][C:35]([C:41]([F:44])([F:42])[F:43])=[C:34]([C:25]2[CH:24]=[CH:23][C:28]([NH2:29])=[CH:27][C:26]=2[C:30]([F:31])([F:32])[F:33])[CH:39]=1参加物
4
実験手順
A solution of polyamic acid was prepared at room temperature by combining 6.893 grams of 6FDA, 1.518 grams of BPDA, 6.608 grams of TFMB and 61.1 grams of NMP with good mixing. The amic acid solution was diluted to 10.9% solids, then cast on a silicon wafer by spin coating, and imidized by a heat treatment up to a maximum temperature of 300° C. to produce a coating having a thickness of 2.1 microns. The refractive index was determined in the same manner as in Example 1 and is reported in Table I.
後処理
- customA solution of polyamic acid was prepared at room temperature
- customimidized by a heat treatment up to a maximum temperature of 300° C.
- customto produce a coating
出典と根拠
- ORDレコード
- ord-dbed9e972a19472fba1f3c23efa6faf6
- 出典データセット
- uspto-grants-1997_07
- 特許番号
- US05649045
関連ノート
読み込み中…