Hexafluorocyclobutene
697-11-0FC1=C(F)C(F)(F)C1(F)FQVHWOZCZUNPZPW-UHFFFAOYSA-N697-11-0DTXSID2073229PFAS -> Other/unspecified
PFAS -> Other/unspecified
PFAS -> Cyclic PFAS
PFAS -> OECD Category
PFAS -> non-polymer
안전 정보는 참고용이며, 공급업체의 물질안전보건자료(SDS), 관련 법규 및 전문가 평가를 대체하지 않습니다.
TIH (Toxic Inhalation Hazard) - Term used to describe gases and volatile liquids that are toxic when inhaled. Some are TIH materials themselves, e.g., chlorine, and some release TIH gases when spilled in water, e.g., chlorosilanes. [ERG 2016].
non-polymer PFAS -> Semiconductor Industry -> Etching the SiO2 coating of the semiconductor device
• Plasma etching in semiconductor manufacturing [Ref: CAS2019 (US6602434)]
용도Hexafluorocyclobutene is used in preparation of fluorine-containing heat transfer fluid.
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