Huagongshe화공사 화학 정보 인쇄 보고서 · 연구 참고용
TIN OXIDE (SnO) → Indium oxide tin oxide ZINC oxide
참여 물질
| 역할 | 이름 | HCID | 투입량 |
|---|---|---|---|
| 반응물 | TIN OXIDE (SnO) | HCID 88989 | — |
| 반응물 | Indium oxide | HCID 150905 | — |
| 반응물 | Zinc Oxide | HCID 3007857 | — |
| 생성물 | Indium oxide tin oxide ZINC oxide | HCID 131731694 | — |
반응 단계
Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.
출처 및 근거
| DOI | 10.6084/m9.figshare.5104873.v1 |
|---|---|
| 특허 번호 | US08785920B2 |
| 출처 데이터셋 | uspto-grants-2014_07 |
| ORD ID | ord-9f62a2d2a543487ba361e59471e21403 |
| 출처 메모 | uspto-grants-2014_07 |