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HRID1628358

反应详情

EQUATION

反应方程式

HRID 1628358 的结构方程式

REACTANTS

反应物

3
结构：[O]=[Sn]
HCID88989

未命名化合物

结构：[In+3].[In+3].[O-2].[O-2].[O-2]
HCID150905

Indium(3+) oxide

In2O3

结构：[O-2].[Zn+2]
HCID3007857

Zinc oxide

OZn

PRODUCTS

生成物

1
结构：[In+3].[In+3].[O-2].[O-2].[O-2].[O-2].[O]=[Sn].[Zn+2]
HCID131731694

未命名化合物

PROCEDURE

实验过程

Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.