2-Heptanone → HCID 86603852, 화합물
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[C:1]([O:7][CH2:8][CH3:9])(=[O:6])[CH2:2][C:3]([CH3:5])=[O:4].[CH3:10][C:11](=[O:17])[CH2:12][CH2:13][CH2:14][CH2:15][CH3:16].C[Si](C)(OC(=O)C)OC(=O)C>C([O-])(=O)C.C[N+](C)(C)C.N#N>[CH3:10][C:11](=[O:17])[CH2:12][CH2:13][CH2:14][CH2:15][CH3:16].[C:1]([O:7][CH2:8][CH3:9])(=[O:6])[CH2:2][C:3]([CH3:5])=[O:4]참가 물질
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- 온도
- 125 °C
실험 절차
0.0126 g tetramethylammonium acetate (Aldrich Chemical Company, Milwaukee, Wis. 53201), were added to 1.247 g ethyl acetoacetate, the mix was stirred until dissolution, then 44.24 g of 2-heptanone (Ultra Pure Solutions Inc., Castroville, Calif. 85012), and 4.49 g of dimethyldiacetoxysilane (Gelest, Tullytone, Pa. 19007) were added in a 60 ml particle free high density polyethylene bottle. The solution was mixed vigorously for one minute. After mixing, the diluted precursor was hand filtered to 0.1 μm using a teflon filter. Approximately 2.0-3.0 ml of The formulation was deposited onto an 8″ etched (C4F8; 20 s.) & ashed (plasma O2; 20 s.) carbon depleted porous SiCOH film (˜4000 Å thick NANOGLASS-E®). After deposition, the wafer was spun at 2500 rpm for 30 seconds to form a film. The films were heated at elevated temperatures for 1 min. each at 125° C., 200° C. and 350° C. in N2. The following results were observed:
후처리
- additionThe solution was mixed vigorously for one minute
- additionAfter mixing
- filtrationfiltered to 0.1 μm
- filtrationfilter
- custometched (C4F8; 20 s.) & ashed (plasma O2; 20 s.) carbon depleted porous SiCOH film (˜4000 Å thick NANOGLASS-E®)
- customto form a film
- customThe following results
출처 및 근거
- ORD 기록
- ord-cb13dce21090401382425ec8d379959b
- 출처 데이터셋
- uspto-grants-2011_03
- 특허 번호
- US07915159B2
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