HRID1024146

反应详情

EQUATION

反应方程式

REACTANTS

反应物

HCID11206014

2-Oxooxolan-3-yl 2-methylprop-2-enoate

C8H10O4

HCID11856523

3-Hydroxyadamantan-1-yl 2-methylprop-2-enoate

C14H20O3

HCID18000579

2-Propenoic acid, 2-methyl-, 1-ethylcyclopentyl ester (9CI, ACI)

C11H18O2

结构：C=C(C)C(=O)OC1C2CC3CC(C2)CC1(C(C)C)C3

HCID66862563

未命名化合物

PRODUCTS

生成物

HCID11856523

3-Hydroxyadamantan-1-yl 2-methylprop-2-enoate

C14H20O3

结构：C=C(C)C(=O)OC1(CC)CCCC1.C=C(C)C(=O)OC1C2CC3CC(C2)CC1(C(C)C)C3

HCID131731389

未命名化合物

AUXILIARIES

试剂、催化剂与溶剂

溶剂HCID8028

Tetrahydrofuran

C4H8O

PROCEDURE

实验过程

A photoresist polymer for use in the lithographic evaluations (below) is prepared according to the following procedure. A solution of 1-isopropyl-adamantanyl methacrylate (IAM) (20 mmol), 1-ethylcyclopentyl methacrylate (ECPMA) (20 mmol), 2-oxo-tetrahydro-furan-3-yl methacrylate (α-GBLMA) (30 mmol), 3-oxo-4,10-dioxa-tricyclo[5.2.1.02,6]dec-8(or 9)-yl methacrylate (ODOTMA) (20 mmol), and 3-hydroxy-adamantanyl methacrylate (HAMA) (10 mmol) dissolved in 30 g of tetrahydrofuran (THF) is degassed by bubbling with nitrogen and charged to a 500 ml flask equipped with a condenser, nitrogen inlet and mechanical stirrer along with an additional 10 g of degassed THF. The solution is brought to reflux, and 5 g of dimethyl-2,2-azodiisobutyrate is dissolved in 5 g of THF and charged in to the flask. The polymerization mixture is then stirred for about 4 hours at reflux, after which time the reaction is diluted with 5 g of THF and the polymerization mixture cooled to room temperature. The polymer is precipitated by addition to 1.0 L of isopropanol, collected by filtration, re-precipitated by dissolving in 50 g THF and addition to another 1.0 L isopropanol, and collected and dried under vacuum at 45° C. for 48 h. to yield photoresist polymer poly(IAM/ECPMA/α-GBLMA/ODOTMA/HAMA). Mw=9,000.

WORKUP

后处理

customA photoresist polymer for use in the lithographic evaluations (below) is prepared
customis degassed
customby bubbling with nitrogen
additioncharged to a 500 ml flask
customequipped with a condenser, nitrogen inlet and mechanical stirrer along with an additional 10 g of degassed THF
temperatureto reflux
dissolution5 g of dimethyl-2,2-azodiisobutyrate is dissolved in 5 g of THF
additioncharged in to the flask
temperatureat reflux
additionafter which time the reaction is diluted with 5 g of THF
customThe polymer is precipitated by addition to 1.0 L of isopropanol
filtrationcollected by filtration
customre-precipitated
dissolutionby dissolving in 50 g THF
additionaddition to another 1.0 L isopropanol
customcollected
customdried under vacuum at 45° C. for 48 h.

来源与证据

来源类型: Open Reaction Database
ORD 记录: ord-1664f4000f30468096d4319c95191a6c
来源数据集: uspto-grants-2014_05
DOI: 10.6084/m9.figshare.5104873.v1
专利: US08722825B2
来源说明: uspto-grants-2014_05

反应 SMILES

[C:1]([O:6][CH:7]1[CH:14]2[CH2:15][CH:10]3[CH2:11][CH:12]([CH2:16][C:8]1([CH:17]([CH3:19])[CH3:18])[CH2:9]3)[CH2:13]2)(=[O:5])[C:2]([CH3:4])=[CH2:3].[C:20]([O:25][C:26]1([CH2:31][CH3:32])[CH2:30][CH2:29][CH2:28][CH2:27]1)(=[O:24])[C:21]([CH3:23])=[CH2:22].C(OC1CCOC1=O)(=O)C(C)=C.[C:45]([O:50][C:51]12[CH2:60][CH:55]3[CH2:56][CH:57]([CH2:59][C:53]([OH:61])([CH2:54]3)[CH2:52]1)[CH2:58]2)(=[O:49])[C:46]([CH3:48])=[CH2:47]>O1CCCC1>[C:1]([O:6][CH:7]1[CH:14]2[CH2:13][CH:12]3[CH2:11][CH:10]([CH2:9][C:8]1([CH:17]([CH3:19])[CH3:18])[CH2:16]3)[CH2:15]2)(=[O:5])[C:2]([CH3:4])=[CH2:3].[C:20]([O:25][C:26]1([CH2:31][CH3:32])[CH2:30][CH2:29][CH2:28][CH2:27]1)(=[O:24])[C:21]([CH3:23])=[CH2:22].[C:45]([O:50][C:51]12[CH2:58][CH:57]3[CH2:56][CH:55]([CH2:54][C:53]([OH:61])([CH2:59]3)[CH2:52]1)[CH2:60]2)(=[O:49])[C:46]([CH3:48])=[CH2:47]