Propylene glycol methyl ether acetate → Gamma-Butyrolactone

Participants

Reaction Steps

To 2 g of the resin obtained in Synthesis Example 2, 0.01 g of a surfactant (manufactured by DIC Corporation, product name: MEGAFAC [trade name] R-30, composed of a fluorine-based surfactant) was added. The resultant mixture was dissolved in 3.5 g of propylene glycol monomethyl ether acetate, 18.4 g of cyclohexanone, and 1.2 g of γ-butyrolactone to obtain a solution. Subsequently, the solution was filtered using a polyethylene microfilter with a pore diameter of 0.2 μm to prepare a solution of the organic underlayer film forming composition for use in a lithography process with a multilayer film.

Provenance & Evidence