Propylene glycol methyl ether acetate → Gamma-Butyrolactone

HRID 1050631Notes

Reaction equation

HRID 1050631 reaction equation
[CH3:1][CH:2]([CH3:9])N=C=NC(C)C.FF.[C:12]([O:15][CH:16]([CH3:20])[CH2:17][O:18]C)(=[O:14])[CH3:13]>>[C:17]1(=[O:18])[CH2:16][CH2:20][CH2:9][CH2:2][CH2:1]1.[C:12]1(=[O:14])[O:15][CH2:16][CH2:20][CH2:13]1

Participants

5

Reactant 3

HCID 7946Propylene glycol methyl ether acetateHCID 12734DiisopropylcarbodiimideHCID 24524Fluorine

Product 2

HCID 7302Gamma-ButyrolactoneHCID 7967Cyclohexanone

Procedure

To 2 g of the resin obtained in Synthesis Example 2, 0.01 g of a surfactant (manufactured by DIC Corporation, product name: MEGAFAC [trade name] R-30, composed of a fluorine-based surfactant) was added. The resultant mixture was dissolved in 3.5 g of propylene glycol monomethyl ether acetate, 18.4 g of cyclohexanone, and 1.2 g of γ-butyrolactone to obtain a solution. Subsequently, the solution was filtered using a polyethylene microfilter with a pore diameter of 0.2 μm to prepare a solution of the organic underlayer film forming composition for use in a lithography process with a multilayer film.

Workup

  1. additionwas added

Sources & evidence

ORD record
ord-ea77bf4a9cc245c29dec0d7987e78ead
Source dataset
uspto-grants-2016_07
Patent number
US09384977B2

Reaction notes

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