HRID1628360

反应详情

EQUATION

反应方程式

HRID 1628360 的结构方程式

PROCEDURE

实验过程

Except that a target containing indium oxide, tin oxide and samarium oxide (molar ratio of In:Sn:Sm=60:35:5) was used, indium oxide-tin oxide-samarium oxide (ITSmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.