HuagongsheHuagongshe Chemistry Print Report · For research reference only
Indium oxide → Indium oxide samarium oxide
Participants
| Role | Name | HCID | Charge |
|---|---|---|---|
| Reactant | Indium oxide | HCID 150905 | — |
| Reactant | Samarium oxide (Sm2O3) | HCID 159425 | — |
| Product | Indium oxide samarium oxide | HCID 131731697 | — |
Reaction Steps
Except that a spattering target containing indium oxide and samarium oxide (molar ratio of In:Sm=90:10) was used, indium oxide-samarium oxide (ISmO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1. [Evaluation of ISmO thin films of Example 1-9 and Comparative 1-9]
Provenance & Evidence
| DOI | 10.6084/m9.figshare.5104873.v1 |
|---|---|
| Patent number | US09249032B2 |
| Source dataset | uspto-grants-2016_02 |
| ORD ID | ord-97421e3459194d7186a29194cf399963 |
| Source note | uspto-grants-2016_02 |