Propylene glycol methyl ether acetate → HCID 86595653, compound

Participants

Reaction Steps

To propyleneglycolmethyletheracetate (PGMEA) (130 g) as an organic solvent were added poly(N,N-dimethylacryladmide/3,3-dimethoxypropene/acrolein) (3 g) obtained from Example 1, poly(methylmethacrylate/2-hydroxyethylmethacrylate/acrylic acid) (7 g) obtained from Example 2 and triphenylsulfonium triflate (0.05 g) as a photoacid generator. The resulting mixture was filtered with a 0.20 μm filter, thereby a disclosed photoresist composition.

Provenance & Evidence