Propylene glycol methyl ether acetate → HCID 86595653, compound

HRID 1793277Notes

Reaction equation

HRID 1793277 reaction equation
[CH3:1]C(OC(C)=O)[CH2:3][O:4]C.C[O:11][CH:12]([O:15][CH3:16])[CH:13]=[CH2:14].[CH:17](C=C)=O>>[CH3:16][O:15][C:12](=[O:11])[C:13]([CH3:1])=[CH2:14].[OH:4][CH2:3][CH2:16][O:15][C:12](=[O:11])[C:13]([CH3:17])=[CH2:14].[C:12]([OH:15])(=[O:11])[CH:13]=[CH2:14]

Participants

3

Reactant 2

HCID 7946Propylene glycol methyl ether acetateHCID 131725869HCID 131725869, compound

Product 1

HCID 86595653HCID 86595653, compound

Procedure

To propyleneglycolmethyletheracetate (PGMEA) (130 g) as an organic solvent were added poly(N,N-dimethylacryladmide/3,3-dimethoxypropene/acrolein) (3 g) obtained from Example 1, poly(methylmethacrylate/2-hydroxyethylmethacrylate/acrylic acid) (7 g) obtained from Example 2 and triphenylsulfonium triflate (0.05 g) as a photoacid generator. The resulting mixture was filtered with a 0.20 μm filter, thereby a disclosed photoresist composition.

Sources & evidence

ORD record
ord-750d8ab497db4ebeb91e5d10a9695c1b
Source dataset
uspto-grants-2006_07
Patent number
US07081325B2

Reaction notes

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