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Into a 500 ml glass reactor equipped with a reflux condenser and a stirrer, 100 g (0.413 mol) of the mixture (1:1) of the 3,4,5,6-tetrafluorophthaloyldifluoride and the 3,3,4,5,6,7-hexafluoro-1-[3H]-isobenzofuranone of Example 2, 43.8 g (0.413 mol) of sodium carbonate and 200 g of xylene were charged, and the mixture was reacted at 130° C. for 3 hours with vigorous stirring. Then, the inorganic substance was removed by filtration, and the residue was subjected to distillation to obtain 83.1 g of tetrafluorophthalic anhydride. The yield was 91.5%.

1. customInto a 500 ml glass reactor equipped with a reflux condenser and a stirrer
2. customthe mixture was reacted at 130° C. for 3 hours with vigorous stirring
3. customThen, the inorganic substance was removed by filtration
4. distillationthe residue was subjected to distillation