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Into a 100 ml glass reactor equipped with a reflux condenser and a stirrer, 50 g (0.207 mol) of the mixture (1:1) of the 3,4,5,6-tetrafluorophthaloyldifluoride and the 3,3,4,5,6,7-hexafluoro-1-[3H]-isobenzofuranone of Example 2, and 17.4 g (0.207 mol) of sodiumhydrogen carbonate were charged, and the mixture was reacted at 130° C. for 5 hours with vigorous stirring. Then the reaction mixture was separated by distillation to obtain 33.0 g of tetrafluorophthalic anhydride. The yield was 72.5%.

1. customInto a 100 ml glass reactor equipped with a reflux condenser and a stirrer
2. customthe mixture was reacted at 130° C. for 5 hours with vigorous stirring
3. customThen the reaction mixture was separated by distillation