反応式
[O-2:1].[In+3:2].[O-2].[O-2].[In+3].[Sn:6]=O.[O-2].[Zn+2:9]>>[O-2:1].[In+3:2].[O-2:1].[O-2:1].[In+3:2].[Sn:6]=[O:1].[O-2:1].[Zn+2:9]参加物
4
実験手順
Except that a target containing indium oxide, tin oxide and zinc oxide (molar ratio of In:Sn:Zn=1:1:1) was used, indium oxide-tin oxide-zinc oxide (ITZO) thin films were formed in the same manner as in Example 1-1 and Comparative 1-1.
出典と根拠
- ORDレコード
- ord-439c4283e71940f89b04c7b2d6d95530
- 出典データセット
- uspto-grants-2016_02
- 特許番号
- US09249032B2
関連ノート
読み込み中…